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Surface-micromachined absolute pressure sensor and a method for manufacturing thereof

  • US 20040020303A1
  • Filed: 05/09/2003
  • Published: 02/05/2004
  • Est. Priority Date: 11/10/2000
  • Status: Active Grant
First Claim
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1. A capacitive pressure sensor structure, in particular for measurement of absolute pressure, the sensor comprising at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apart (10) from said fixed electrode (3), characterized in that a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7).

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