Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
First Claim
1. A capacitive pressure sensor structure, in particular for measurement of absolute pressure, the sensor comprising at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apart (10) from said fixed electrode (3), characterized in that a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7).
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Abstract
The present publication discloses a capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor comprises at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apart (10) from said fixed electrode (3). According to the invention, a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7).
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Citations
19 Claims
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1. A capacitive pressure sensor structure, in particular for measurement of absolute pressure, the sensor comprising
at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apart (10) from said fixed electrode (3), characterized in that a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7).
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10. A method of manufacturing a capacitive pressure sensor structure, in particular a sensor for measurement of absolute pressure, the sensor comprising
at least one fixed electrode (3), and at least one movable electrode (6, 7) electrically isolated from said fixed electrode (3) and spaced apart (10) from said fixed electrode (3), characterized in that a portion of said movable electrode (6, 7) is formed from a porous polycrystalline silicon layer (6) that in a finished component remains as an integral portion of said flexibly movable electrode (6, 7).
Specification