Grating device with high diffraction efficiency

• US 20040021946A1
• Filed: 08/02/2002
• Published: 02/05/2004
• Est. Priority Date: 08/02/2002
• Status: Active Grant

• Current Assignee: Lumela
• Original Assignee: Chromaplex, Inc.
• Inventors: Frankel, Robert, Popov, Evgeny, Neviere, Michel, Hoose, John
• Granted Patent: US 6,958,859 B2
• Time in Patent Office: Days
• US Class Current: 359/571
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength
• CPC Class Codes: G02B 5/1861 Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence

Abstract

A grating structure with a dielectric coating is disclosed that operates efficiently away from the blaze angle in low order with a high diffraction efficiency and high wavelength dispersion. Such grating structure can be employed in Littrow configuration to provide, for example, cavity feedback in excimer lasers.

Claims

1. Grating device for efficient operation at an angle of incidence different from a blaze angle, the grating device comprising:

a grating structure having grating facets and a grating period,

a multilayer dielectric coating disposed at least on the grating facets and having layers alternating between a first and second refractive index,

wherein half the grating period is substantially identical to the wavelength of the diffracted light beam times the order of diffraction, and

wherein the optical thickness of two successive layers of the multilayer dielectric coating at the angle of incidence is selected to be substantially identical to one half of the wavelength of the diffracted light beam.

2. The grating device of claim 1, wherein the grating structure is a triangular grating structure.

3. The grating device of claim 1, further including a flat section oriented substantially parallel to a major surface of the grating structure, said flat section disposed at an apex defined by adjacent grating facets.

4. The grating device of claim 1, wherein the grating structure is made of a crystalline material.

5. The grating device of claim 4, wherein the grating facets comprise crystal planes of the crystalline material.

6. The grating device of claim 4, wherein the crystalline material is silicon.

7. The grating device of claim 1, wherein the multilayer dielectric coating comprises materials selected from the group consisting of oxides, nitrides, oxinitrides and fluorides of group II, group III and group IV elements.

8. Method for operating an optical grating device in low diffraction order at an angle of incidence substantially different from a blaze angle, the method comprising:

producing a grating structure with the selected blaze angle, with a grating period being substantially identical to the wavelength of the diffracted light beam times the order of diffraction, and

applying to the grating structure a multilayer dielectric coating having layers alternating between a first and second refractive index, wherein the optical thickness of two successive layers of the multilayer dielectric coating at the angle of incidence is selected to be approximately identical to one half of the wavelength of the diffracted light beam.

9. The method of claim 8, wherein producing said grating structure includes etching a semiconductor wafer to expose natural crystal planes of the wafer.

10. The method of claim 9, wherein the semiconductor wafer comprises silicon.