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Grating device with high diffraction efficiency

  • US 20040021946A1
  • Filed: 08/02/2002
  • Published: 02/05/2004
  • Est. Priority Date: 08/02/2002
  • Status: Active Grant
First Claim
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1. Grating device for efficient operation at an angle of incidence different from a blaze angle, the grating device comprising:

  • a grating structure having grating facets and a grating period, a multilayer dielectric coating disposed at least on the grating facets and having layers alternating between a first and second refractive index, wherein half the grating period is substantially identical to the wavelength of the diffracted light beam times the order of diffraction, and wherein the optical thickness of two successive layers of the multilayer dielectric coating at the angle of incidence is selected to be substantially identical to one half of the wavelength of the diffracted light beam.

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