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Switch, integrated circuit device, and method of manufacturing switch

  • US 20040022044A1
  • Filed: 07/30/2003
  • Published: 02/05/2004
  • Est. Priority Date: 01/30/2001
  • Status: Active Grant
First Claim
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1. A switch for connecting a first terminal with a second terminal electrically, comprising:

  • the first terminal;

    the second terminal confronting said first terminal;

    driving means for driving said first terminal in the direction of said second terminal; and

    an electrostatic coupling section including a first electrode and a second electrode confronting each other for attracting said first terminal in the direction of said second terminal by electrostatic force.

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