Switch, integrated circuit device, and method of manufacturing switch

• US 20040022044A1
• Filed: 07/30/2003
• Published: 02/05/2004
• Est. Priority Date: 01/30/2001
• Status: Active Grant

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: Miyazaki, Masaru, Yasuoka, Masazumi
• Granted Patent: US 6,813,133 B2
• Time in Patent Office: Days
• US Class Current: 361/801
• CPC Class Codes: H01H 1/20 Bridging contacts for circuit breakers H01H73/045
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 50/005 using micromechanics
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

There is provided a switch 10 for connecting a first terminal with a second terminal electrically. The switch 10 includes: the first terminal 46; the second terminal 26 and a third terminal 28 confronting said first terminal 46; driving means 70 for driving the first terminal 46 in the direction of the second terminal 26 and the third terminal 28; and an electrostatic coupling section 72 including a first electrode 50 and a second electrode 30 confronting each other for attracting the first terminal 46 in the direction of the second terminal 26 and the third terminal 28 by electrostatic force.

Claims

1. A switch for connecting a first terminal with a second terminal electrically, comprising:

the first terminal;

the second terminal confronting said first terminal;

driving means for driving said first terminal in the direction of said second terminal; and

an electrostatic coupling section including a first electrode and a second electrode confronting each other for attracting said first terminal in the direction of said second terminal by electrostatic force.

2. The switch as claimed in claim 1, wherein said driving means drives said first terminal in the direction of said second terminal by electric power supply.

3. The switch as claimed in claim 1, further comprising electric power supply means for supplying electric power to at least either said driving means or said electrostatic coupling section.

4. The switch as claimed in claim 1, further comprising a third terminal confronting said first terminal, wherein

said first terminal connects said second terminal with said third terminal electrically by said first terminal contacting said second terminal and said third terminal.

5. The switch as claimed in claim 1 wherein, said driving means comprises a moving section which hold said first terminal and is driven in the direction of said second terminal.

6. The switch as claimed in claim 5, further comprising:

a wiring provided at said moving section with one end of said wiring connecting with said first terminal; and

a third terminal connecting with another end of said wiring, wherein

said first terminal connects said second terminal with said third terminal electrically by contacting said second terminal.

7. The switch as claimed in claim 5, further comprising:

a wiring provided at said moving section with one end of said wiring connecting with said first terminal;

a third terminal connecting with another end of said wiring; and

a fourth terminal confronting said third terminal, wherein

said driving means drives said third terminal in the direction of said fourth terminal, and

said electrostatic coupling section further comprises a third electrode and a fourth electrode confronting each other for attracting said third terminal in the direction of said fourth terminal by electrostatic force.

8. The switch as claimed in claim 5, further comprising a supporting section for supporting said moving section, wherein

said first terminal is provided between said supporting section and said first electrode.

9. The switch as claimed in claim 5, further comprising a supporting section for supporting said moving section, wherein

said first electrode is provided between said supporting section and said first terminal.

10. The switch as claimed in claim 5, further comprising two of said electrostatic coupling sections, wherein

said first electrodes of said two electrostatic coupling sections are provided in a direction perpendicular to a longitudinal direction of said moving section on both sides of said first terminal.

11. The switch as claimed in claim 5, wherein width of a part, where said first terminal in said moving section is provided, is narrower than width of another part.

12. The switch as claimed in claim 5, wherein said moving section comprises a plurality of components having different coefficients of thermal expansion from one another.

13. The switch as claimed in claim 5, wherein said moving section comprises shape memory alloy.

14. The switch as claimed in claim 13, wherein said driving means further comprises a heater for heating said shape memory alloy.

15. The switch as claimed in claim 5, further comprising:

a substrate on which said second terminal is provided; and

a supporting section provided on said substrate for supporting said moving section.

16. The switch as claimed in claim 15, wherein said driving means further comprises first magnetic material provided at said moving section, and second magnetic material provided at said substrate.

17. The switch as claimed in claim 1, wherein said driving means comprises a heater for heating a plurality of components in which said coefficients of thermal expansion are different form one another.

18. The switch as claimed in claim 1, wherein said driving means comprises a piezoelectric element.

19. A switch for connecting a first terminal with a second terminal electrically, comprising:

the first terminal;

the second terminal confronting said first terminal;

driving means for driving said first terminal in the direction opposite to said second terminal; and

an electrostatic coupling section including a first electrode and a second electrode confronting each other for attracting said first terminal in the direction of said second terminal by electrostatic force.

20. An integrated circuit device in which a plurality of switches for connecting a first terminal with a second terminal electrically are provided on a substrate, wherein said switches comprises:

a first terminal;

a second terminal confronting said first terminal;

driving means for driving said first terminal in the direction of said second terminal; and

an electrostatic coupling section including a first electrode and a second electrode confronting each other for attracting said first terminal in the direction of said second terminal by electrostatic force.