Systems and methods for overcoming stiction using a lever
First Claim
1. A method for manipulating a first plate in a MEMS device relative to a second plate in a MEMS device, the method comprising:
- providing a first actuator and a second actuator disposed above a base layer;
providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed above the base layer between the first actuator and the second actuator;
providing a second plate supported by a second pivot, wherein the second plate is disposed above the second actuator and the second pivot is dispose above the base layer;
activating the second actuator to cause the second plate to impact the first plate.
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Accused Products
Abstract
A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
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Citations
16 Claims
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1. A method for manipulating a first plate in a MEMS device relative to a second plate in a MEMS device, the method comprising:
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providing a first actuator and a second actuator disposed above a base layer;
providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed above the base layer between the first actuator and the second actuator;
providing a second plate supported by a second pivot, wherein the second plate is disposed above the second actuator and the second pivot is dispose above the base layer;
activating the second actuator to cause the second plate to impact the first plate. - View Dependent Claims (2, 3, 4)
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5. An apparatus adapted for encouraging a structural plate in a MEMS device to deflect toward a static position, the apparatus comprising:
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a base layer;
a first pivot and a second pivot disposed on the base layer;
a first structural plate supported by the first pivot and disposed above the base layer, wherein the first structural plate is deflected away from the static position;
a second structural plate supported by the second pivot and disposed above the base layer; and
wherein the second structural plate is movable to generate a physical force, and wherein the physical force encourages the first structural plate to move toward the static position. - View Dependent Claims (6, 7)
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8. A MEMS device adapted for overcoming a stiction force incident at a stop position, the device comprising:
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a base layer;
a first plate supported by a first pivot, wherein the first plate is disposed above the base layer and the first pivot is disposed on the base layer;
a second plate supported by a second pivot, wherein the second plate is disposed above the base layer and the second pivot is disposed on the base layer;
a first actuator for deflecting the first plate and a second actuator for deflecting the second plate, wherein the first actuator is electrically connected to the second actuator; and
wherein energizing the first and second actuators causes the first plate to deflect away from the second plate and the second plate to deflect away from the first plate.
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9. A method for generating a physical force in an electro-mechanical device, the method comprising:
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providing a base layer;
providing a first pivot and a second pivot disposed on the base layer;
providing a first structural plate supported by the first pivot and disposed above the base layer;
providing a second structural plate supported by the second pivot and disposed above the base layer; and
deflecting the second structural plate to contact the first structural plate. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A wavelength router for receiving light having a plurality of spectral bands at an input port and directing a subset of the spectral bands to one of a plurality of output ports, the wavelength router comprising:
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a free-space optical train disposed between the input port and the output ports, wherein the optical train provides at least one path for routing the subset of the spectral bands, the optical train including a dispersive element disposed to intercept light traveling from the input port; and
a routing mechanism having at least one dynamically configurable routing element to direct a given spectral band to different output ports depending on a state of the dynamically configurable routing element, wherein the dynamically configurable routing element comprises;
a control member supported by a first pivot and disposed over a base layer, wherein the control member is tilted such that an edge of the control member contacts a first point above the base layer;
a micromirror assembly supported by a second pivot and disposed adjacent to the control member over the base layer, wherein the micromirror assembly is tilted such that an edge of the micromirror assembly contacts a second point on the control member; and
wherein a combination of a restorative force between the control member and the first pivot and a restorative force between the micromirror assembly and the second pivot causes the micromirror assembly to deflect toward a static position.
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Specification