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Systems and methods for overcoming stiction using a lever

  • US 20040022483A1
  • Filed: 08/01/2003
  • Published: 02/05/2004
  • Est. Priority Date: 07/03/2001
  • Status: Active Grant
First Claim
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1. A method for manipulating a first plate in a MEMS device relative to a second plate in a MEMS device, the method comprising:

  • providing a first actuator and a second actuator disposed above a base layer;

    providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed above the base layer between the first actuator and the second actuator;

    providing a second plate supported by a second pivot, wherein the second plate is disposed above the second actuator and the second pivot is dispose above the base layer;

    activating the second actuator to cause the second plate to impact the first plate.

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