Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS
First Claim
1. A microelectromechanical system (MEMS) formed on a substrate, the MEMS comprising:
- a utilization device having a first state and a second state;
a Lorentz force actuator comprising an actuator element coupled to the utilization device, the actuator element being displaceable by the Lorentz force to alter the state of the utilization device from the first state to the second state thereof; and
an electrostatic device coupled to the utilization device, the electrostatic device being electrically chargeable to electrostatically hold the utilization device in the second state thereof.
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Accused Products
Abstract
A microelectromechanical system (MEMS), formed on a substrate, comprises a utilization device having a first state and a second state, and a Lorentz force actuator having an actuator element coupled to the utilization device. The actuator element is displaceable by the Lorentz force to alter the state of the utilization device from the first state to the second state thereof. An electrostatic device, coupled to the utilization device, is electrically chargeable to electrostatically hold the utilization device in the second state thereof with minimal electrical power consumption. The utilization device may be of any kind including electrical, fluidic, optical or mechanical. For example, the utilization device may comprise an electrical switch, in which case the first state of the utilization device may comprise an open state of the switch and the second state may comprise a closed state of the switch. The bidirectionality of the Lorentz force facilitates opening a MEMS switch whose contacts are stuck and makes possible the design of MEMS switches having double-throw configurations.
Also disclosed is a method for operating a MEMS actuator having an electrically conductive actuator element movable between a first position and a second position. The method comprises the steps of passing an electrical current through the actuator element in a predetermined direction in the presence of an intercepting magnetic field to move the actuator element from the first position toward the second position in response to the action of the Lorentz force, electrostatically holding the actuator element in the second position, and terminating the electrical current through the actuator element.
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Citations
49 Claims
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1. A microelectromechanical system (MEMS) formed on a substrate, the MEMS comprising:
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a utilization device having a first state and a second state;
a Lorentz force actuator comprising an actuator element coupled to the utilization device, the actuator element being displaceable by the Lorentz force to alter the state of the utilization device from the first state to the second state thereof; and
an electrostatic device coupled to the utilization device, the electrostatic device being electrically chargeable to electrostatically hold the utilization device in the second state thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An apparatus comprising:
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a MEMS module comprising;
an armature deflectable between a first state and a second state;
a utilization device responsive to the deflection of the armature and movable thereby from a first position corresponding to the first state of the armature, to a second position corresponding to the second state of the armature; and
an electrostatic device coupled to the utilization device;
a first voltage source connectable to the armature for passing an electrical current through the armature;
a second voltage source connectable to the electrostatic device; and
means for producing a magnetic field oriented to intercept the electrical current passing through the armature, the passage of current through the armature causing the armature to deflect from the first state to the second state thereof in response to the action of the Lorentz force, the electrostatic device being electrically chargeable by the second voltage source to electrostatically hold the utilization device in the second position thereof. - View Dependent Claims (22, 23, 24)
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25. A MEMS switch formed on a substrate, the MEMS switch comprising:
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an electrically conductive actuator element attached to an electrically conductive anchor structure formed on the substrate, at least a portion of the actuator element being movable relative to the substrate between a rest state and a forced state, the actuator element being adapted to be connected to an electrical power supply through the anchor structure for passing an electrical current through the actuator element, the movable portion of the actuator element carrying an electrical contact means; and
a load circuit terminal means formed on the substrate, the electrical contact means carried by the movable portion of the actuator element confronting said load circuit terminal means and being separated therefrom by a gap in the rest state of the movable portion of the actuator element, and wherein passing an electrical current through the actuator element in the presence of a magnetic field intercepting the electrical current causes the movable portion of the actuator element to move from the rest state to the forced state in response to the action of the Lorentz force to close the gap between the electrical contact means and the load circuit terminal means and to thereby close the MEMS switch. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. A method for operating a MEMS actuator, the MEMS actuator comprising an electrically conductive actuator element movable between a first position and a second position, the method comprising the steps of:
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passing an electrical current through the actuator element in a predetermined direction in the presence of an intercepting magnetic field to move the actuator element from the first position toward the second position in response to the action of the Lorentz force;
electrostatically holding the actuator element in the second position; and
terminating the electrical current through the actuator element. - View Dependent Claims (47, 48, 49)
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Specification