Tunable optical filter
First Claim
1. A tunable optical filter comprising:
- a first optical portion;
a second optical portion located a distance from the first optical portion;
at least one deformable membrane actuator that is configured to alter the distance between the first optical portion and the second optical portion, the deformable membrane actuator located outside of an optical volume that is defined by the location of the first optical portion and the location of the second optical portion.
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Accused Products
Abstract
A tunable optical filter including at least one deformable membrane actuator. The actuator may comprise an array of a thousand or millions of individual actuator cells for strength and mechanical robustness. The deformable membrane actuator including a first primary substrate having a first optical portion, an electrically conductive and deformable membrane, an electrically conductive primary substrate electrode and a membrane support structure. The substrate electrode and the membrane support structure are disposed on or adjacent to the first primary substrate, the deformable membrane being supported by the membrane support structure, and a second substrate having a second optical portion. The second substrate is supported by a load support structure disposed on one surface of the deformable membrane and is located a distance from the first substrate. When a voltage is applied between the deformable membrane and the electrically conductive layer, the deformable membrane deforms and alters the distance between the first optical portion and the second optical portion.
290 Citations
39 Claims
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1. A tunable optical filter comprising:
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a first optical portion;
a second optical portion located a distance from the first optical portion;
at least one deformable membrane actuator that is configured to alter the distance between the first optical portion and the second optical portion, the deformable membrane actuator located outside of an optical volume that is defined by the location of the first optical portion and the location of the second optical portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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- 36. A deformable membrane actuator comprising a deformable membrane having electrically conductive properties, a membrane support structure and an electrode layer, the membrane support structure being disposed between the deformable membrane and the electrode layer and forming at least one well and where a voltage applied between the electrode layer and the deformable membrane causes the deformable membrane to deflect into the well and towards the electrode layer.
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39. An array of tunable optical filters comprising:
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a first substrate including a first plurality of first optical portions;
a first plurality of second substrates, each second substrate including a second optical portion, each second optical portion being disposed proximate to each first optical portion to form an optical volume through which light travels; and
a second plurality of deformable membrane actuators that are each disposed between the first substrate and each second substrate and disposed outside of each optical volume formed between each said first optical portion and each said second optical portion that is proximate to the first optical portion, each said deformable membrane actuator configured to alter the distance between each said first optical portion and each said second optical portion.
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Specification