Optical multilayer structure and its production method, optical switching device, and image display
First Claim
1. An optical multilayer structure, comprising:
- a configuration including a first layer being light-absorptive, a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a second layer being transparent disposed in this order on a substrate, wherein the first layer has as large a thickness as optical information of the substrate becomes invisible, and where a complex refractive index of the first layer is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 3 is satisfied.
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Abstract
Provided is an optical multilayer structure having a simpler configuration, flexibility in selection of materials and improved reliability in wiring and capable of high-speed response even in a visible light range. A optical multilayer structure (1) comprises a first layer (11) being light-absorptive and making contact with a substrate (10), a gap portion (12) having as large a size as light interference phenomenon can occur and being capable of varying the size, and a second layer (13) being transparent in this order on the substrate (10). Where a complex refractive index of the first layer (11) is N1 (=n1−i·k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer (13) is n2, and a refractive index of an incident medium is 1.0, the optical multilayer structure (1) is configured so as to satisfy the following formula.
370 Citations
22 Claims
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1. An optical multilayer structure, comprising:
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a configuration including a first layer being light-absorptive, a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a second layer being transparent disposed in this order on a substrate, wherein the first layer has as large a thickness as optical information of the substrate becomes invisible, and where a complex refractive index of the first layer is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 3 is satisfied. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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2. An optical multilayer structure, comprising:
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a configuration including a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a transparent layer disposed in this order on a substrate being light-absorptive, wherein where a complex refractive index of the substrate is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the transparent layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 4 is satisfied.
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13. An optical switching device, comprising:
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an optical multilayer structure including a first layer being light-absorptive, a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a second layer being transparent disposed in this order on a substrate; and
a driving means for varying an optical size of the gap portion, wherein the first layer has as large a thickness as optical information becomes invisible, and where a complex refractive index of the first layer is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 5 is satisfied.
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14. An optical switching device, comprising:
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an optical multilayer structure including a gap portion with as large a size as an light interference phenomenon can occur, the size being variable, and a transparent layer disposed in this order on a substrate being light-absorptive; and
a driving means for varying an optical size of the gap portion, wherein where a complex refractive index of the substrate is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the transparent layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 6 is satisfied.
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15. An image display apparatus for displaying a two-dimensional image through irradiating a plurality of optical switching devices one-dimensionally or two-dimensionally arranged with light,
each of the optical switching devices comprising: -
an optical multilayer structure including a first layer being light-absorptive, a gap portion with as large a size as an light interference phenomenon can occur, the size being variable, and a second layer being transparent disposed in this order on a substrate; and
a driving means for varying an optical size of the gap portion, wherein the first layer has as large a thickness as optical information becomes invisible, and where a complex refractive index of the first layer is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 7 is satisfied.
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16. An image display apparatus for displaying a two-dimensional image through irradiating a plurality of optical switching devices one-dimensionally or two-dimensionally arranged with light,
each of the optical switching devices comprising: -
an optical multilayer structure including a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a transparent layer disposed in this order on a substrate being light-absorptive; and
a driving means for varying an optical size of the gap portion, wherein where a complex refractive index of the substrate is N1 (=n1−
i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the transparent layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 8 is satisfied.
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17. A method of manufacturing an optical multilayer structure, the optical multilayer structure including a first layer being light-absorptive, a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a second layer being transparent disposed in this order on a substrate, wherein the first layer has as large a thickness as optical information becomes invisible, and where a complex refractive index of the first layer is N1 (=n1−
- i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the second layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 9 is satisfied,the method comprising the step of forming a sacrificial layer on the first layer after forming the first layer on the substrate, and then forming the second layer on the sacrificial layer, and after that, selectively removing the sacrificial layer to form the gap portion. - View Dependent Claims (19, 20, 22)
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18. A method of manufacturing an optical multilayer structure, the optical multilayer structure including a gap portion with as large a size as a light interference phenomenon can occur, the size being variable, and a transparent layer disposed in this order on a substrate being light-absorptive, wherein where a complex refractive index of the substrate is N1 (=n1−
- i·
k1, n1 is a refractive index, k1 is an extinction coefficient, and i is an imaginary unit), a refractive index of the transparent layer is n2, and a refractive index of an incident medium is 1.0, a relationship of Mathematical Formula 10 is satisfied,the method comprising the step of;
forming a sacrificial layer on the substrate, and then forming the transparent layer on the sacrificial layer, and after that, selectively removing the sacrificial layer to form the gap portion. - View Dependent Claims (21)
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Specification