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Method and its apparatus for classifying defects

  • US 20040028276A1
  • Filed: 02/28/2003
  • Published: 02/12/2004
  • Est. Priority Date: 08/12/2002
  • Status: Active Grant
First Claim
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1. A method for classifying defects, comprising the steps of:

  • imaging a sample for obtaining an image of said sample;

    extracting a defect image of said sample by comparing said sample image with a reference image;

    associating said extracted defect image with a plurality of corresponding classes for classifying said defect image;

    storing information on said association;

    specifying a restricting condition for classifying said defect image into said plurality of classes;

    classifying said extracted defect image into said plurality of classes by using said stored associating information and said specified restricting condition; and

    displaying said classified defect image on a screen.

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