Low temperature method for forming a microcavity on a substrate and article having same
First Claim
1. A low temperature method for forming a microcavity on a substrate, the method comprising:
- forming a sacrificial spacer on a region of the substrate;
depositing a metal film to a desired thickness over the sacrificial spacer to encapsulate the sacrificial spacer;
forming at least one fluid passageway communicating the sacrificial spacer with the ambient; and
removing the sacrificial spacer through the at least one fluid passageway so that the metal film forms a metal diaphragm which defines a microcavity.
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Accused Products
Abstract
A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.
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Citations
22 Claims
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1. A low temperature method for forming a microcavity on a substrate, the method comprising:
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forming a sacrificial spacer on a region of the substrate;
depositing a metal film to a desired thickness over the sacrificial spacer to encapsulate the sacrificial spacer;
forming at least one fluid passageway communicating the sacrificial spacer with the ambient; and
removing the sacrificial spacer through the at least one fluid passageway so that the metal film forms a metal diaphragm which defines a microcavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An article of manufacture comprising:
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a substrate;
a metal diaphragm which defines a sealed vacuum microcavity and which has a desired thickness; and
at least one microstructure formed on the substrate and located within the sealed vacuum microcavity. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification