×

Low temperature method for forming a microcavity on a substrate and article having same

  • US 20040028849A1
  • Filed: 04/16/2003
  • Published: 02/12/2004
  • Est. Priority Date: 04/18/2002
  • Status: Active Grant
First Claim
Patent Images

1. A low temperature method for forming a microcavity on a substrate, the method comprising:

  • forming a sacrificial spacer on a region of the substrate;

    depositing a metal film to a desired thickness over the sacrificial spacer to encapsulate the sacrificial spacer;

    forming at least one fluid passageway communicating the sacrificial spacer with the ambient; and

    removing the sacrificial spacer through the at least one fluid passageway so that the metal film forms a metal diaphragm which defines a microcavity.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×