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Waferless metrology recipe generator and generating method

  • US 20040030430A1
  • Filed: 06/26/2003
  • Published: 02/12/2004
  • Est. Priority Date: 06/27/2002
  • Status: Abandoned Application
First Claim
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1. A waferless metrology recipe generator for creating a metrology recipe used to implement SEM-based dimensional metrology that evaluates a pattern transferred onto a wafer according to CAD data, the recipe generator comprising:

  • alignment-specifying means for specifying alignment in CAD based on the CAD data;

    coordinate-specifying means for specifying coordinates of positions on the wafer where metrology should be performed;

    metrology type-specifying means for specifying a metrology type for each specified coordinate; and

    recipe creation means for creating the metrology recipe in response, to the alignment specifying means, coordinate specifying means, and metrology type-specifying means.

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