Technique for microstructuring replication mold

• US 20040032667A1
• Filed: 08/18/2003
• Published: 02/19/2004
• Est. Priority Date: 04/03/2000
• Status: Abandoned Application

• Current Assignee: CSEM Centre Suisse D'Electronique et de Microtechnique SA
• Original Assignee: CSEM Centre Suisse D'Electronique et de Microtechnique SA
• Inventors: Rossi, Markus, Sochtig, Juergen, Gale, Michael
• Application Number:
  US10/257,005
• Publication Number:
  US 20040032667A1
• Time in Patent Office: Days
• US Class Current: 359/642
• CPC Class Codes: B29C 33/3842 Manufacturing moulds, e.g. shaping the mould surface by machining
• CPC Class Codes: B29C 33/424 Moulding surfaces provided with means for marking or patterning for injection moulding B29C45/372
• CPC Class Codes: B29C 45/372 provided with means for marking or patterning, e.g. numbering articles
• CPC Class Codes: B29L 2011/0016 Lenses
• CPC Class Codes: G02B 5/008 Surface plasmon devices diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553
• CPC Class Codes: G02B 5/1866 Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: G03H 1/04 Processes or apparatus for producing holograms G03H1/26 takes precedence
• CPC Class Codes: G03H 2001/0284 by moulding
• CPC Class Codes: G03H 2001/043 Non planar recording surface, e.g. curved surface
• CPC Class Codes: G03H 2260/14 Photoresist
• CPC Class Codes: G03H 2260/63 Indirect etching, e.g. lithography photoresist G03H2260/14

Abstract

A surface microstructure is superimposed on the surface of a replication mould such as an injection moulding tool insert by laser interference exposure of a mask pattern and etching or electroplating the additional microstructure. The technique enables the post-processing of planar and non-planar replication moulds with additional microstructure to improve the functionality and value of the moulded components. A major area of application is an anti-reflection surface for injection moulded polymer optical components, achieved by the superposition of submicrometer anti-reflection grating structure onto injection moulding tool inserts.

Claims

1. A method for fabricating a mould, comprising the steps of;

depositing a resist on a surface of the mould;

patterning the resist in a predetermined pattern;

modifying the shape of the mould surface according to the pattern defined by the exposed resist; and

removing the resist.

2. A method according to claim 1, in which the step of modifying the shape of the mould surface comprises the step of etching the mould surface.

3. A method according to claim 1, in which the step of modifying the shape of the mould surface comprises the step of plating the mould surface.

4. A method according to claim 1, 2 or 3, in which the step of patterning the resist comprises exposing the resist to a laser interference pattern or a holographic image.

5. A method according to any preceding claim, in which the mould surface is curved.

6. A method according to any preceding claim, in which the modification to the shape of the mould surface has a characteristic dimension of between 100 nm and 400 nm.

7. A method according to any preceding claim, in which the modification to the shape of mould is for forming an antireflection surface, diffractive elements or microrelief features in th surface of an article made in the mould.

8. A mould fabricated using a method as defined in any preceding claim.

9. An article made using a mould as defined in claim 8.

10. An article according to claim 9, being an optical component, such as a lens or a lens for eyesight correction.