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Erosion-resistant components for plasma process chambers

  • US 20040033385A1
  • Filed: 06/25/2001
  • Published: 02/19/2004
  • Est. Priority Date: 06/25/2001
  • Status: Active Grant
First Claim
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1. An erosion-resistant article comprising:

  • a support; and

    an oxide coating comprising yttrium disposed over said support, wherein said support and said oxide coating have material compositions that differ from one another in coefficient of thermal expansion by no more than 5×

    10

    6
    /K, and wherein said erosion-resistant article is a plasma process chamber component.

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