Positioning system for use in lithographic apparatus

• US 20040036035A1
• Filed: 08/27/2003
• Published: 02/26/2004
• Est. Priority Date: 12/01/1999
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Patrick Kwan, Yim Bun, Chretien Lucien, Serge Felix, Veldhuis, Gerjan Peter
• Granted Patent: US 6,852,989 B2
• Time in Patent Office: Days
• US Class Current: 250/442.11
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A positioning system, such as may be used to position a moveable object table in three degrees of freedom. More particularly, the invention relates to the use of the positioning system in a lithographic projection apparatus including an illumination system for supplying a projection beam of radiation, a first object table for holding a mask, a second, movable object table for holding a substrate, and a projection system for imaging an irradiated portion of the mask onto a target portion of the substrate.

Claims

1. A lithographic projection apparatus for imaging of a mask pattern in a mask onto a substrate provided with a radiation sensitive layer, the apparatus comprising:

an illumination system to supply a projection beam of radiation;

a first object table to hold the mask;

a second object table to hold the substrate;

a projection optical system that images irradiated portions of the mask onto target portions of the substrate;

an object table positioning system constructed and arranged to position at least one of said object tables in a plane, said object table positioning system including;

first and second side-beams having respective first and second sliders mounted thereon;

first and second motors that move said first and second sliders substantially longitudinally along each respective side beam;

a cross-beam mounted proximate first and second ends thereof to said first and second sliders respectively and having a third slider mounted thereto, said cross-beam and said first and second sliders being mounted together;

a third motor that moves said third slider longitudinally along said cross-beam, said third slider being adapted to support said one object table; and

,

a thrust bearing pivotally mounted to said first slider, said thrust bearing transmitting a force in said plane and substantially perpendicular to said first side beam between said cross-beam and said first side beam.