MEMS tunable filters

• US 20040036558A1
• Filed: 08/21/2002
• Published: 02/26/2004
• Est. Priority Date: 08/21/2002
• Status: Active Grant

• Current Assignee: Raytheon Company (Rtx Corporation)
• Original Assignee: Raytheon Company (Rtx Corporation)
• Inventors: Allison, Robert C., Nakahira, Ron K., Rowland, Jerold K.
• Granted Patent: US 6,784,766 B2
• Time in Patent Office: Days
• US Class Current: 333/205
• CPC Class Codes: H01P 1/203 Strip line filters

Abstract

A method for the design of tunable filters is disclosed. MEMS switches are used to alter the resonant frequency of one or more resonators. By tuning the resonant frequency of the resonators, the filter'"'"'s characteristics also are tuned. Furthermore, MEMS switches are used to alter the input coupling, including direct input coupling and capacitive input coupling. Direct input coupling is altered by using the MEMS switches to select different input connection points. Capacitive input coupling is altered by using MEMS switches to add additional input capacitance to an input coupling capacitor.

Claims

1. An integrated circuit tunable filter, comprising:

a substrate;

an input line on the substrate;

an output line on the substrate;

a plurality of tuning stubs on the substrate; and

a plurality of resonators on the substrate, wherein at least one resonator is operatively coupled to the input line and at least one resonator is operatively coupled to the output line, and the plurality of resonators include at least one MEMS switch, wherein the at least one MEMS switch connects and disconnects the resonator to at least one of the plurality of tuning stubs to adjust the center frequency of the tunable filter.

2. The integrated circuit tunable filter of claim 1, wherein at least one of the tuning stubs includes at least one MEMS switch.

3. The integrated circuit tunable filter of claim 2, wherein each MEMS switch includes a control signal to command the MEMS switch to open and close.

4. The integrated circuit tunable filter of claim 3, wherein the tuning stubs are connected serially to the resonator, one after the other, and downstream tuning stubs receive the control signal from an upstream MEMS switch.

5. The integrated circuit tunable filter of claim 3, wherein the resonator includes a grounding leg to provide a path to route the control signal.

6. The integrated circuit tunable filter of claim 1, wherein the resonator is a transmission line resonator.

7. The integrated circuit tunable filter of claim 1, further comprising direct input coupling and direct output coupling.

8. The integrated circuit tunable filter of claim 7, wherein the direct input coupling and the direct output coupling are adjustable.

9. The integrated circuit tunable filter of claim 8, wherein the direct input coupling and the direct output coupling are adjusted using a plurality of MEMS switches to select one of a plurality of different input connections and one of a plurality of different output connections.

10. The integrated circuit tunable filter of claim 1, further comprising capacitive input coupling and capacitive output coupling.

11. The integrated circuit tunable filter of claim 10, wherein the capacitive input coupling and the capacitive output coupling are adjustable.

12. The integrated circuit tunable filter of claim 11, wherein the capacitive input coupling and the capacitive output coupling are adjusted using a plurality of MEMS switches coupled to capacitors to add additional capacitance to the input coupling and the output coupling.

13. The integrated circuit tunable filter of claim 1, wherein the filter is implemented using a microstrip parallel coupled line structure.

14. The integrated circuit tunable filter of claim 1, wherein the filter is implemented using a microstrip interdigitated structure.

15. The integrated circuit tunable filter of claim 1, wherein the filter is implemented using a microstrip end coupled structure.

16. The integrated circuit tunable filter of claim 1, wherein the tuning stubs provide substantially constant bandwidth throughout a band of interest.

17. An integrated circuit tunable band-pass filter, comprising:

a substrate;

an input line on the substrate;

an output line on the substrate;

a plurality of interdigitated stripline resonators on the substrate, wherein at least one interdigitated stripline resonator is connected to the input line and at least one interdigitated stripline resonator is connected to the output line; and

a plurality of switch-capacitor groups on the substrate, wherein each switch-capacitor group includes a capacitor connected in series to a micro electro mechanical system (MEMS) switch, and each MEMS switch connects or disconnect the respective capacitor from one of the plurality of interdigitated stripline resonators.

18. The integrated circuit tunable band-pass filter of claim 17, wherein the substrate further comprises two substrates fired together and a thick film dielectric paste is used to form the stripline resonators.

19. The integrated circuit tunable band-pass filter of claim 18, wherein the substrate is comprised of a High-K dielectric ceramic material.

20. The integrated circuit tunable band-pass filter of claim 19, wherein the dielectric constant is approximately 65.

21. The integrated circuit tunable band-pass filter of claim 17, wherein the ceramic structure is externally metallized to provide a stripline ground.

22. The integrated circuit tunable band-pass filter of claim 21, wherein the ceramic structure is externally metallized using a thick film gold.

23. The integrated circuit tunable band-pass filter of claim 17, wherein the tuning stub geometry provides substantially constant bandwidth throughout a band of interest.

24. An integrated circuit tunable band-stop filter, comprising:

a substrate;

an input line on the substrate;

an output line on the substrate;

a transmission line on the substrate, wherein the transmission line is operatively coupled to the input line and the output line;

a plurality of switch-capacitor groups on the substrate, wherein each switch-capacitor group includes a capacitor connected in series to a micro electro mechanical system (MEMS) switch, and each MEMS switch connects or disconnects the respective capacitor from the transmission line; and

a plurality of transmission line resonators on the substrate, wherein each transmission line resonator is coupled to the transmission line through one of the plurality of switch-capacitor groups.

25. The integrated tunable band-stop filter of claim 24, wherein the transmission line resonators are quarter wavelength resonators, and the resonators are spaced along the transmission line at quarter wavelength intervals.

26. The integrated circuit tunable band-stop filter of claim 25, wherein the transmission line resonators are interleaved.

27. The integrated circuit tunable band-stop filter of claim 25, wherein each MEMS switch is positioned between the resonator and the capacitor to place a parasitic resonant frequency substantially above a band of interest.

28. The integrated circuit tunable band-stop filter of claim 27, wherein the transmission line impedance is about 50 ohms.

29. The integrated circuit tunable filter of claim 25, further comprising capacitive input coupling and capacitive output coupling.

30. The integrated circuit tunable filter of claim 29, wherein the capacitive input coupling and the capacitive output coupling are adjustable.

31. The integrated circuit tunable filter of claim 30, wherein the capacitive input coupling and the capacitive output coupling are adjusted using a plurality of MEMS switches coupled to capacitors to add additional capacitance to the input coupling and the output coupling.

32. The integrated circuit tunable filter of claim 25, wherein the filter is implemented using a microstrip structure.

33. The integrated circuit tunable filter of claim 25, wherein each MEMS switch is positioned relative to the capacitor to reduce the effects of parasitic resonance and reduce the effects of switch loss.

34. An integrated circuit tunable filter, comprising:

a substrate;

an input line on the substrate;

an output line on the substrate;

a plurality of resonators on the substrate; and

a plurality of micro electro mechanical system (MEMS) switches on the substrate, wherein at least one MEMS switch alters the resonant frequency of the resonators to change the filtering characteristics of the tunable filter.