Three-dimensional intergrated inductor, its module and fabrication method of the same

• US 20040036569A1
• Filed: 08/20/2002
• Published: 02/26/2004
• Est. Priority Date: 08/20/2002
• Status: Active Grant

• Current Assignee: Asia Pacific Microsystems Incorporated (Unimicron Technology Corporation)
• Original Assignee: Asia Pacific Microsystems Incorporated (Unimicron Technology Corporation)
• Inventors: Lee, Chun-Hsien, Tsai, Shu-Hui, Liang, Shang-Yu
• Granted Patent: US 6,859,129 B2
• Time in Patent Office: Days
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0033 with the coil helically wound around a magnetic core
• CPC Class Codes: H01F 41/042 by thin film techniques
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A three dimensional adjustable high frequency inductor, its module and fabrication method of the same; the high frequency module comprises micro high frequency inductors, filters, resistors, capacitors and associated with active components or power components to form a hybrid circuit, then it is packaged by using the technology of flip chip or wafer level packaging, so as to upgrade properties of high frequency modules and reduce the packaging and instrumentation costs by minimizing the modular size.

Claims

1. A three dimensional adjustable high frequency inductor comprising

a plurality of jointed pads fixed on a substrate;

a metallic pattern for a lower layer inductor extendable to said jointed pads;

a metallic pattern for an upper layer inductor also extendable to said jointed pads; and

an intermediate metallic part interconnecting said upper and said lower metallic patterns.

2. A method for of fabricating a three dimensional adjustable high frequency inductor, comprising the steps of:

providing a substrate;

forming a first metallic pattern on said substrate;

forming a first dielectric layer uniformly covering said first metallic pattern;

removing part of said first dielectric layer in a defined region to form an empty hole, and filling said empty hole with a second dielectric layer;

defining said second dielectric layer, and forming a second metallic pattern to interconnect said upper and said lower metallic patterns; and

forming a third metallic pattern on the entire structure as the topmost metallic pattern of said high frequency inductor, and to make electrical communication with other circuital components.

3. The method as claimed in claim 2, wherein it further includes a step of forming a plurality of jointed pads for trimming the value of inductance according to actual requirement.

4. The method as claimed in claim 2, wherein said jointed pads are formed fixedly on said substrate or said dielectric layer for trimming value of inductance, and sustaining the entire inductor structure so as to stabilize the structure of said three dimensional high frequency inductor, wherein said jointed pads are arrayed at one side, or staggeringly disposed along two sides to sustain said structure more firmly.

5. The method as claimed in claim 2, wherein said structure of the three dimensional inductor is recessively mounted between the walls of said substrate and said dielectric layers so as to avoid inadvertent destruction from external forces.

6. The method as claimed in claim 2, wherein all of said jointed pads are disposed on a same plane for the convenience of trimming inductance value and electrical connection afterwards.

7. A method of fabricating a three dimensional adjustable high frequency inductor, comprising the steps of:

providing a substrate;

forming a sustaining layer on said substrate;

forming a first metallic pattern on said sustaining layer;

forming a first dielectric layer uniformly covering said first metallic pattern;

removing part of said first dielectric layer in a defined region to form an empty hole, and filing said empty hole with a second dielectric layer;

defining said second dielectric layer, and forming a second metallic pattern to interconnect said upper and said lower metallic patterns;

forming a third metallic pattern on the entire structure as the topmost metallic pattern of said high frequency inductor, and to make electrical connection with other circuital components; and

removing said substrate with an etchant to form a blank cavity.

8. The method as claimed in claim 7, wherein it further includes a step of forming a plurality of jointed pads for trimming the value of inductance according to actual requirement.

9. The method as claimed in claim 7, wherein said jointed pads are formed fixedly on said substrate or said dielectric layer for trimming value of inductance, and sustaining the entire inductor structure so as to stabilize the structure of said three dimensional high frequency inductor, therein said jointed pads are arrayed at one side, or staggeringly disposed along two sides to sustain said structure more firmly.

10. The method as claimed in claim 7, wherein said structure of three dimensional inductor is recessively mounted between the walls of said substrate and said dielectric layers so as to avoid inadvertent destruction from external force.

11. The method as claimed in claim 7, wherein all said jointed pads are disposed on a same plane for the convenience of trimming inductance value and electrical connection afterwards.

12. The method as claimed in claim 7, wherein the step of removing said substrate with an etchant to form said blank cavity is carried out with either etching from the front surface or form the rear surface to eliminate the substrate effect.

13. A method of fabricating a three dimensional adjustable high frequency inductor, comprising the steps of:

providing a substrate;

depositing and defining a resistor layer on said substrate;

depositing and by etching or lifting-off method to define two terminals of said resistor, and a first metallic pattern to serve as a lower electrode of a capacitor;

depositing and defining a first dielectric layer and a second metallic pattern;

forming a second dielectric layer for isolation on said resistor and said capacitor;

forming a third metallic pattern on said second dielectric layer;

forming a third dielectric layer uniformly covering said third metallic pattern;

removing said third dielectric layer and filling with a fourth dielectric layer in a defined region;

defining said fourth dielectric layer and forming a fourth metallic pattern to interconnect the upper and the lower metallic patterns; and

forming a fifth metallic pattern on the entire structure as the topmost metallic pattern of said high frequency inductor, and for electrical connection with other circuital components.

14. The method as claimed in claim 13, wherein said first dielectric layer interlarded between said first and said second metallic patterns, and said metallic patterns are formed into a capacitor.

15. The method as claimed in claim 13, wherein said second dielectric layer has a sufficient thickness to cover all components by uniformly coating on said substrate.

16. The method as claimed in claim 13, wherein said high frequency inductor is disposed at a side or upper position of other present passive components such as said resistor and said capacitor so as to form an effectively space saving and less interference micro high frequency module.

17. A method of fabricating a three dimensional high frequency inductor, comprising the steps of:

providing a first substrate;

forming circuit units such as a capacitor unit, a resistor unit, and an inductor unit on said first substrate; and

combining a second substrate containing circuit unit with crystal stabilized or wafer level packing through metal conductors and jointing nodes.

18. The method as claimed in claim 17, wherein it further comprises a step of forming a first and a second dielectric layers for isolating a capacitor unit, a resistor unit, and an inductor unit.

19. The method as claimed in claim 17, wherein said circuit units are active component, a power component, and other basic frequency circuit.