Micro-structures with individually addressable ribbon pairs

• US 20040036950A1
• Filed: 08/20/2002
• Published: 02/26/2004
• Est. Priority Date: 08/20/2002
• Status: Active Grant

• Current Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Original Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Inventors: Hunter, Jim, Amm, David, Gudeman, Christopher
• Granted Patent: US 7,057,795 B2
• Time in Patent Office: Days
• US Class Current: 359/295
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements

Abstract

An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Claims

1. A micro-device comprising:

a. a plurality of ribbon pairs configured to move relative to each other, wherein each of the ribbon pairs are individually addressable; and

b. a light source for directing beams of the light to each of the plurality of ribbon pairs.

2. The device of claim 1, wherein each ribbon pair comprise a bias ribbon and an active ribbon.

3. The device of claim 1, wherein each ribbon pair comprises an active ribbon and a bias suspended over a substrate.

4. The device of claim 1, wherein the ribbon pairs are configured for modulating light.

5. The device of claim 1, wherein the ribbon pairs comprise ribbon that are in a range 5.0 to 20 microns wide.

6. The device of claim 1, wherein the ribbon pairs comprise ribbons that are in a range of 20 to 60 microns long.

7. The device of claim 1, wherein each ribbon pair comprises silicon nitride with a reflective aluminum layer.

8. The device of claim 4, wherein the light source comprises optical fibers, wherein individual optical fibers are in communication with individual ribbon pairs.

9. The system of claim 1, further comprising one or more driver circuits in electrical communication with each of the plurality of ribbon pairs for individually addressing each of the plurality of ribbon pairs.

10. The system of claim 8, wherein the light source is configured for generating light comprising a wavelength in a range of 0.4 to 2.0 microns.

11. A system comprising:

a. a plurality ribbon pairs arranged over a substrate;

b. conductive leads to at least one of the ribbons pairs;

c. one or more driver circuits coupled to the conductive leads for individually controlling voltages applied thereto; and

d. a light source for directing beams of the light to each of the plurality of ribbon pairs.

12. The system of claim 11, wherein the light source comprises one or more optical fibers for delivering incident light beams to the ribbon pairs.

13. The system of claim 11, wherein one or more of the optical fibers is also configured to capture and transmit reflected light from the plurality of ribbons.

14. The system of claim 11, wherein the modulate light that is reflected parallel to the incident beams.

15. The system of claim 14, wherein the system is configured to couple to a fiber optic network.

16. The system of claim 11, wherein each ribbon pair is configured to generate a bit of data.

17. The system of claim 11, wherein the one or more optical fibers are configured to couple with individual single ribbon pairs.

18. The system of claim 11, wherein the plurality of ribbon pairs are configured to modulate light having a wavelength in a range of 0.4 to 2.0 microns.

19. The system of claim 18, wherein the ribbon pairs comprise ribbons that are in a range of 5.0 to 20 microns wide and are in a range of 20 to 60 microns long.

20. A system comprising:

a. ribbon pairs;

b. optical fibers coupled to each of the ribbon pairs for transmitting light to individual ribbon pairs and for capturing reflected light from the individual ribbon pairs;

c. means to move at least one ribbon from each of the ribbon pairs for modulating the reflected light.

21. The system of claim 20, wherein the reflective light is reflected substantially normal to surfaces of the ribbon pairs.

22. The system of claim 20, wherein the means to move at least one ribbon from each of the ribbon pairs comprises a driver circuit capable of controlling bias voltages applied to each of the ribbon pairs individually.

23. The system of claim 20, wherein the ribbon pairs comprise ribbons that are in a range of 5.0 and 20 microns wide.

24. The system of claim 20, wherein the ribbon pairs comprise ribbons that are in range of 20 and 60 microns long.

25. The system of claim 20, wherein the optical fibers are configured to transmit light with a wavelength in a range 0.4 to 2.0 microns.

26. The system of claim 20, further comprising an converter for converting the reflected light into digital electronic data.

27. A MEM device comprising a plurality of elongated ribbons alternating with stationary bias ribbons and movable active ribbons, wherein each of the movable active ribbon are configured to be independently addressed with a voltage and wherein each adjacent pair of stationary bias ribbons and movable active ribbons are configured to be individually registered.

28. The MEM device of claim 27, wherein each adjacent pair of stationary bias ribbons and movable active ribbons are configured to be individually registered through an optical fiber in communication with an adjacent pair wherein the optical fiber captures light reflected from the adjacent pair.

29. The MEM device of claim 28, wherein the movable active ribbons are configured to be individually addressable through a driver circuit for applying a bias voltages to the movable active ribbons.

30. The MEM device of claim 27, wherein the ribbon are in a range of 5 and 20 microns wide and in a range of 20 and 60 micron long.

31. The MEM device of claim 27, wherein elongated ribbons comprise silicon nitride and a reflective coating.

32. A method of generating data comprising:

a. transmitting individual beams of light onto individual pairs of reflective ribbons; and

b. registering reflected light from each of the individual pairs of reflective ribbons to generate a first set data.

33. The method of claim 32, further comprising selectively moving a portion of reflective ribbon and registering reflected light from each of the individual pairs of reflective ribbons to generate a second set of data.

34. The method of claim 32, wherein the step of transmitting individual beams of light comprises directing the light onto the individual pairs of reflective ribbons through optical fibers.

35. The method of claim 34, wherein the step of registering light reflected from the individual pairs of ribbons comprises collecting the reflected light through the optical fibers.

36. The method of claim 32, wherein the light is pulsed.

37. The method of claim 32, wherein the light has a wavelength in a range of 0.4 to 2.0 microns.

38. The method of claim 35, wherein the step of registering light reflected from the individual pairs of ribbons further comprises converting the reflected light into an digital electronic signal.