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Microresonant sensors and methods of use thereof

  • US 20040038195A1
  • Filed: 03/17/2003
  • Published: 02/26/2004
  • Est. Priority Date: 09/20/2000
  • Status: Abandoned Application
First Claim
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1. A method of monitoring density in a fluid, comprising:

  • placing said fluid into contact with a micromechanical sensor assembly comprising a membrane having an upper surface facing toward said fluid and a lower surface facing away from said fluid, wherein said membrane vibrates in response to electrical current; and

    monitoring a vibrational frequency of said membrane, wherein said vibrational frequency is related to density of a volume of said fluid at or near said membrane upper surface.

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