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METHOD FOR FABRICATING BULBOUS-SHAPED VIAS

  • US 20040038552A1
  • Filed: 08/23/2002
  • Published: 02/26/2004
  • Est. Priority Date: 08/23/2002
  • Status: Active Grant
First Claim
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1. A method for fabricating vias on a substrate having a surface, comprising:

  • disposing, on said substrate, a polymerizable fluid composition;

    contacting said polymerizable fluid composition with a mold having a relief structure on a surface thereof to create a bi-level recess in a layer of said polymerizable fluid composition, with said bi-level recess including a nadir and shoulders spaced-apart from said nadir;

    subjecting said polymerizable fluid composition to conditions to polymerize said polymerizable fluid composition, forming a polymerized layer having a solidified bi-level indentation; and

    defining an opening to said surface of said substrate by selectively removing material disposed on said substrate, with said material including a sub-section of said polymerized material located proximate to said bi-level indentation.

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