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Piezoelectric composite apparatus and a method for fabricating the same

  • US 20040040132A1
  • Filed: 09/03/2003
  • Published: 03/04/2004
  • Est. Priority Date: 10/29/1999
  • Status: Active Grant
First Claim
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1. A method of fabricating a piezoelectric composite apparatus, comprising the steps of:

  • providing a plurality of wafers of piezoelectric material;

    bonding the wafers together with an adhesive material to form a stack of alternating layers of piezoelectric material and adhesive material, the stack having a thickness;

    cutting through the stack in a direction substantially parallel to the thickness of the stack and across the alternating layers of piezoelectric material and adhesive material to provide at least one piezoelectric fiber sheet comprising a plurality of piezoelectric fibers in juxtaposition to adhesive material, the at least one piezoelectric fiber sheet having a first side and a second side;

    providing a first film having a first conductive pattern and a second conductive pattern formed thereon, the first conductive pattern being electrically isolated from the second conductive pattern, the first and second conductive patterns each having a plurality of electrodes that cooperate to form a pattern of interdigitated electrodes;

    providing a second film;

    bonding the second film to the second side of the at least one piezoelectric fiber sheet; and

    bonding the first film to the first side of the at least one piezoelectric fiber sheet such that the conductive patterns of the first film electrically contact the piezoelectric fibers of the at least one piezoelectric fiber sheet.

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