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Electrostatic chuck device

  • US 20040040665A1
  • Filed: 06/17/2003
  • Published: 03/04/2004
  • Est. Priority Date: 06/18/2002
  • Status: Active Grant
First Claim
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1. An electrostatic chuck device comprised of:

  • a dielectric plate having a surface embossed to give a plurality of projections, an electrode, and an external power source, wherein substrate supporting surfaces of said plurality of projections are covered by conductor wiring and said conductor wiring electrically connects the substrate supporting surfaces of said plurality of projections.

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