Cubic memory array
First Claim
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1. A cubic memory array, comprising:
- a substrate having a planar surface;
a plurality of first select-lines organized in more than one plane parallel to the planar surface;
a plurality of second select-lines formed in pillars disposed orthogonal to the planer surface of the substrate; and
a plurality of memory cells respectively coupled to the plurality of first and plurality of second select-lines.
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Abstract
A cubic memory array is fabricated on a substrate having a planar surface. The cubic memory array includes a plurality of first select-lines organized in more than one plane parallel to the planar surface. A plurality of second select-lines is formed in pillars disposed orthogonal to the planer surface of the substrate. A plurality of memory cells are respectively coupled to the plurality of first and plurality of second select-lines.
37 Citations
71 Claims
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1. A cubic memory array, comprising:
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a substrate having a planar surface;
a plurality of first select-lines organized in more than one plane parallel to the planar surface;
a plurality of second select-lines formed in pillars disposed orthogonal to the planer surface of the substrate; and
a plurality of memory cells respectively coupled to the plurality of first and plurality of second select-lines. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A 3D-memory array on a substrate defining a plane, comprising:
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a plurality of memory cells stacked vertically, comprising, a dielectric layer forming an insulating surface a first select-line disposed parallel to the plane of the substrate on the dielectric layer, a control element surrounding the first select-line, and a memory storage element at least partially surrounding the control element; and
a vertical pillar connected to a second select-line, substantially orthogonal to the plane of the substrate and contacting the memory storage element. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method of creating a memory circuit, comprising the steps of:
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forming an array of first select-lines in a plane substantially parallel to a substrate;
forming an array of second select-lines normal to plane of the first select-lines; and
forming an array of memory cells, each respectively coupled to a respective first and second select-line. - View Dependent Claims (35, 36, 37, 38, 39, 40)
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41. A method of fabricating a memory circuit, comprising the steps of:
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applying an insulator on a substrate;
applying a set of first conductors in one or more planes parallel to the substrate;
creating a set of control elements on respective first conductors;
applying a second conductor orthogonal to the planes of the first conductors; and
creating a set of memory storage elements between the second conductor and the respective control elements. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A memory circuit, comprising:
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means for selecting a first select-line within an array of memory cells, said means disposed in a plane; and
means for selecting a second select-line within the selected array of memory cells, said means disposed in a direction normal to the plane of said means for selecting a first select-line. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60)
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61. A memory cell, comprising:
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a vertical pillar extending from the bottom of the cell to the top of the cell;
a control element having a first cross sectional area;
a storage element having a second cross sectional area less than the first cross section area, the storage element in contact with the vertical pillar; and
a middle electrode coupling the control element to the storage element. - View Dependent Claims (62, 63, 64, 65, 66, 67, 68, 69, 70, 71)
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Specification