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Radial antenna and plasma device using it

  • US 20040045674A1
  • Filed: 06/18/2003
  • Published: 03/11/2004
  • Est. Priority Date: 08/04/2000
  • Status: Active Grant
First Claim
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1. A radial antenna characterized by comprising a first conductive plate in which a plurality of slots are formed, a second conductive plate having a microwave inlet and disposed opposite to said first conductive plate, a ring member for connecting peripheral edges of said first and second conductive plates, and a conductive adjusting member provided on said second conductive plate in a radial waveguide formed by said first and second conductive plates and serving to adjust a distance up to said first conductive plate.

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