Apparatus and method for synthesizing films and coatings by focused particle beam deposition

• US 20040046130A1
• Filed: 09/10/2003
• Published: 03/11/2004
• Est. Priority Date: 07/19/2000
• Status: Active Grant

• Current Assignee: Regents of The University of Minnesota (University of Minnesota)
• Original Assignee: Regents of The University of Minnesota (University of Minnesota)
• Inventors: Rao, Nagaraja P, Girshick, Steven L., McMurry, Peter H., Gerberich, William, Heberlein, Joachim
• Granted Patent: US 6,924,004 B2
• Time in Patent Office: Days
• US Class Current: 250/492.1
• CPC Class Codes: C04B 35/565 based on silicon carbide
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: C23C 24/04 Impact or kinetic deposition of particles
• CPC Class Codes: C23C 4/12 characterised by the method of spraying
• CPC Class Codes: C23C 4/134 Plasma spraying
• CPC Class Codes: H05H 3/02 Molecular or atomic beam generation charge exchange devices G21K1/14; polarising devices G21K1/16; using resonance or molecular beams for analysing or investigating materials G01N24/002; atomic clock G04F5/14; beam masers H01S1/06
• CPC Class Codes: Y10T 137/0379 By fluid pressure
• CPC Class Codes: Y10T 137/7754 Line flow effect assisted

Abstract

A particle beam deposition apparatus includes a particle source for generating a plurality of particles in suspended form, an expansion chamber, and a deposition chamber connected to the expansion chamber by an aerodynamic focusing stage, and containing a substrate. The aerodynamic focusing stage may be comprised of a plurality of aerodynamic focusing elements, or lenses. Particles, including nanoparticles, may be deposited on the substrate by generating an aerosol cloud of particles, accelerating the particles into the expansion chamber, creating a collimated beam out of the particles by passing them through the aerodynamic focusing lenses and into a deposition chamber, and impacting the particles into the substrate.

Claims

1. A particle deposition apparatus, comprising:

a) a particle source that generates a plurality of particles in a suspended form;

b) an expansion chamber in communication with the particle source and having an interior pressure that is substantially lower than the interior pressure of the particle source;

c) a deposition chamber;

d) a substrate support located inside the deposition chamber; and

e) an aerodynamic focusing stage connecting the expansion chamber to the deposition chamber, and comprising a plurality of aerodynamic focusing elements.

2. The particle deposition apparatus of claim 1, wherein the particle source generates a plurality of nanoparticles.

3. The particle deposition apparatus of claim1, wherein the particle source includes a dc torch.

4. The particle deposition apparatus of claim1, wherein the particle source is a thermal plasma expansion reactor.

5. The particle deposition apparatus of claim1, wherein the particle source is a laser pyrolisis reactor.

6. The particle deposition apparatus of claim1, wherein the particle source is an evaporation-condensation reactor

7. The particle deposition apparatus of claim1, wherein the particle source is an electrospray particle source.

8. The particle deposition apparatus of claim1, wherein the aerodynamic focusing stage comprises between two and five aerodynamic focusing elements.

9. The particle deposition apparatus of claim1, further comprising a hollow nozzle between the particle source and the expansion chamber.

10. The particle deposition apparatus of claim 9, wherein the hollow nozzle generates a hypersonic flow of particles, and the aerodynamic focusing stage focuses the flow of particles into a collimated beam.

11. The particle deposition apparatus of claim 10, wherein the substrate support is positioned normal to the collimated beam.

12. he particle deposition apparatus of claim 1, wherein the substrate support is translatable.

13. A method for depositing particles on a substrate, comprising the steps of:

a) generating an aerosol cloud of particles;

b) accelerating the particles through a nozzle;

c) creating a collimated beam of particles by passing the particle through a plurality of aerodynamic focusing lenses;

d) impacting the collimated beam of particles against the substrate.

14. The method of claim 13, wherein the particles are comprised of nanoparticles.

15. The method of claim 13, wherein the aerosol cloud is generated in a plasma expansion reactor.

16. The method of claim 13, wherein the nanoparticles are accelerated through the nozzle to hypersonic speeds.

17. The method of claim 13, further including the step of translating the substrate in a predetermined manner to create a pattern of nanoparticles on the substrate.

18. The method of claim 17, wherein the substrate is translated in more than one direction.

19. A particle structure comprised of particles, formed by the steps of:

a) generating an aerosol cloud of particles;

b) accelerating the particles through a nozzle;

c) creating a collimated beam of particles by passing the particles through a plurality of aerodynamic focusing lenses;

d) impacting the collimated beam of particles against a substrate.

20. The particle structure of claim 19, wherein the particles are comprised of silicon carbide.

21. The particle structure of claim 19, wherein the particles form a functional structure.

22. The particle structure of claim 19, wherein the particles form a protective coating

23. The particles structure of claim 19, wherein the particles are comprised of nanoparticles.

24. The particles structure of claim 19, wherein the particles consist essentially of nanoparticles.