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Heated gas distribution plate for a processing chamber

  • US 20040050492A1
  • Filed: 09/16/2002
  • Published: 03/18/2004
  • Est. Priority Date: 09/16/2002
  • Status: Active Grant
First Claim
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1. An apparatus for distributing gas in a processing system, comprising:

  • a gas distribution assembly having;

    a gas distribution plate defining a plurality of holes through which gases are transmitted;

    a gas box coupled to the gas distribution plate, the gas box being configured to supply the gases into the plurality of holes; and

    a means for minimizing heat transfer from the gas distribution plate to the gas box.

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