Method and device for atmospheric plasma processing

• US 20040050685A1
• Filed: 10/23/2003
• Published: 03/18/2004
• Est. Priority Date: 11/14/2000
• Status: Abandoned Application

• Current Assignee: Sekisui Chemical Company Limited (Sekisui)
• Original Assignee: Sekisui Chemical Company Limited (Sekisui)
• Inventors: Yuasa, Motokazu, Kozuma, Makoto, Yara, Takuya, Homma, Koji
• Application Number:
  US10/416,154
• Publication Number:
  US 20040050685A1
• Time in Patent Office: Days
• US Class Current: 204/164
• CPC Class Codes: C23C 16/4409 characterised by sealing means
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/45595 Atmospheric CVD gas inlets with no enclosed reaction chamber
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: C23C 16/515 using pulsed discharges
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: G21C 3/08 provided with external means to promote heat-transfer, e.g. fins, baffles
• CPC Class Codes: H01J 2237/188 Differential pressure
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H05H 2240/10 at atmospheric pressure
• CPC Class Codes: Y02E 30/30 Nuclear fission reactors

Abstract

The present invention provides a method and an equipment for plasma treatment under the atmospheric pressure for treating an article to be treated comprising: providing a solid dielectric on at least one opposing face of a pair of opposing electrodes under a pressure near the atmospheric pressure; introducing a treatment gas between said a pair of opposing electrodes; generating plasma by applying an electric field between said electrodes; and contacting said plasma with said article to be treated, wherein an used gas is exhausted from the vicinity of treatment section where said plasma and said article to be treated are in contact, and said vicinity of treatment section is maintained under a specified gas atmosphere by a gas atmosphere control mechanism.

Claims

1. A method for plasma treatment under the atmospheric pressure for treating an article to be treated comprising:

providing a solid dielectric on at least one opposing face of a pair of opposing electrodes under a pressure near the atmospheric pressure;

introducing a treatment gas between said a pair of opposing electrodes;

generating plasma by applying an electric field between said electrodes; and

contacting the plasma with the article to be treated, wherein an used gas is exhausted from the vicinity of treatment section where said plasma and said body to be treated are in contact, and said vicinity of treatment section is maintained under a specified gas atmosphere by a gas atmosphere control mechanism.

2. The method for plasma treatment under the atmospheric pressure according to claim 1, wherein said exhaustion of the used gas from the vicinity of treatment section is performed by a gas passage control mechanism composed of a passage for the plasma gas blown out, a passage to an exhaust gas exit and a sealed space substantially preventing a gas flow to said vicinity of treatment section.

3. The method for plasma treatment under the atmospheric pressure according to claim 1, wherein said exhaustion of the used gas from said vicinity of treatment section is performed by an exhaustion mechanism which exhausts the used gas from the back side of a support for said article to be treated.

4. The method for plasma treatment under the atmospheric pressure according to one of claims 1 to 3, wherein said gas atmosphere control mechanism is a mechanism whereby said vicinity of treatment section, where said plasma and said article to be treated are in contact, is maintained under the specified gas atmosphere by a gas curtain mechanism.

5. The method for plasma treatment under the atmospheric pressure according to one of claims 1 to 4, wherein said vicinity of treatment section, where said plasma and said article to be treated are in contact, is maintained under the specified gas atmosphere by providing an exhaust gas exit in the periphery of said vicinity of treatment section where said plasma and said article to be treated are in contact, and also said gas curtain mechanism in the periphery of said vicinity of an exhaust gas exit.

6. The method for plasma treatment under the atmospheric pressure according to claim 1, wherein, in the plasma treatment using a remote source having an extended length of nozzle equipped in crosswise direction of said article to be treated, an exhaust gas exit is provided in crosswise direction of the treatment section where said plasma and said article to be treated are in contact, and a side seal mechanism is provided in the lengthwise direction of said treatment section.

7. The method for plasma treatment under the atmospheric pressure according to claim 1, wherein said vicinity of treatment section, where said plasma and said article to be treated are in contact, is maintained under the specified gas atmosphere by conducting the treatment in a vessel through which the specified gas flows.

8. The method for plasma treatment under the atmospheric pressure according to claim 1, wherein at least two chambers composed of chamber 1 enclosing a discharge plasma generation section and said article to be treated and chamber 2 enclosing said chamber 1 are provided, and those chambers are designed so that a gas flows out from said chamber 1 and the external air flows into said chamber 2 by making the pressure in said chamber 2 lower than the pressure in said chamber 1, and also lower than the external atmospheric pressure.

9. The method for plasma treatment under the atmospheric pressure according to one of claims 1 to 8, wherein said specified gas atmosphere comprises at least one kind of gas selected from the group consisting of nitrogen, argon, helium, neon, xenon and dry air.

10. The method for plasma treatment under the atmospheric pressure according to one of claims 1 to 8, wherein said electric field applied between the electrodes is a pulse-like electric field having a pulse rise time and/or a pulse decay time of not longer than 10 μ

s and a field strength of 10 to 1,000 kV/cm.

11. An equipment for plasma treatment under the atmospheric pressure comprising:

a pair of opposing electrodes with a solid dielectric being provided on at least one opposing face thereof;

a mechanism for introducing a treatment gas between said a pair of opposing electrodes;

a mechanism for applying an electric field between said electrodes;

a mechanism for contacting the plasma obtained by said electric field with said article to be treated;

a mechanism for exhausting an used gas; and

a mechanism for maintaining the vicinity of treatment section, where said plasma and said article to be treated are in contact, under the specified gas atmosphere.

12. The equipment for plasma treatment under the atmospheric pressure according to claim 11, wherein said mechanism for exhausting the used gas from said vicinity of treatment section is a gas passage control mechanism composed of a passage for said plasma gas blown out, a passage to an exhaust gas exit and a sealed space substantially preventing a gas flow to said vicinity of treatment section.

13. The equipment for plasma treatment under the atmospheric pressure according to claim 11, wherein said mechanism for maintaining said vicinity of treatment section, where said plasma and said article to be treated are in contact, under the specified gas atmosphere is a gas curtain mechanism.

14. The equipment for plasma treatment under the atmospheric pressure according to one of claims 11 to 13, wherein said vicinity of treatment section, where said plasma and said article to be treated are in contact, is maintained under the specified gas atmosphere, by providing a gas exhausting mechanism in the periphery of said vicinity of treatment section, where said plasma and said article to be treated are in contact, and said gas curtain mechanism in the periphery of the gas exhausting mechanism.

15. The equipment for plasma treatment under the atmospheric pressure according to claim 11, wherein said vicinity of treatment section, where said plasma and said article to be treated are in contact, is maintained under the specified gas atmosphere by conducting the treatment in a vessel through which the specified gas flows.

16. The equipment for plasma treatment under the atmospheric pressure according to claim 11, wherein at least two chambers composed of chamber 1 enclosing a discharge plasma generation section and said article to be treated and chamber 2 enclosing said chamber 1 are provided, and those chambers are designed so that a gas flows out from said chamber 1 and the external air flows into said chamber 2 by making the pressure in said chamber 2 lower than the pressure in said chamber 1, and also lower than the external atmospheric pressure.