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System and method for resetting a reaction mass assembly of a stage assembly

  • US 20040051854A1
  • Filed: 06/11/2003
  • Published: 03/18/2004
  • Est. Priority Date: 11/16/2000
  • Status: Active Grant
First Claim
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1. A stage assembly for use with an apparatus, the stage assembly moving a device relative to a stage base so that the device is properly positioned for one or more operations performed by the apparatus, the stage assembly comprising:

  • a stage that retains the device;

    a stage mover assembly that moves the stage relative to the stage base, the stage mover assembly generating reaction forces;

    a reaction mass assembly coupled to the stage mover assembly, the reaction mass assembly reducing the reaction forces that are transferred to the stage base;

    a reaction mover assembly that moves the reaction mass assembly relative to the stage base; and

    a control system connected to the reaction mover assembly, the control system controlling excitation of the reaction mover assembly based upon the status of the one or more operations.

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