Network-based photomask data entry interface and instruction generator for manufacturing photomasks
First Claim
1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:
- an interface computer accessible to a remote customer computer via a remote network connection, and during the network connection, the interface computer operable to perform the following tasks;
receive photomask specification data from the customer computer, validate the photomask specification data, and download validation results to the customer computer;
wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;
a photomask specification database in communication with the interface computer, operable to store the photomask specification data;
a command generator in communication with the photomask specification database, operable to generate fracturing instructions and control instructions in response to the photomask specification data;
a customer design database that stores design data for the photomask; and
a fracture engine that receives the fracturing instructions and the design data and uses this data to generate fractured pattern data.
4 Assignments
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Accused Products
Abstract
A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer'"'"'s computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer'"'"'s local network. The manufacturer'"'"'s computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.
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Citations
26 Claims
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1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:
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an interface computer accessible to a remote customer computer via a remote network connection, and during the network connection, the interface computer operable to perform the following tasks;
receive photomask specification data from the customer computer, validate the photomask specification data, and download validation results to the customer computer;
wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;
a photomask specification database in communication with the interface computer, operable to store the photomask specification data;
a command generator in communication with the photomask specification database, operable to generate fracturing instructions and control instructions in response to the photomask specification data;
a customer design database that stores design data for the photomask; and
a fracture engine that receives the fracturing instructions and the design data and uses this data to generate fractured pattern data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A network-based method of generating instructions for use by photomask manufacturing equipment, comprising the steps of:
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downloading a series of display screens to a customer computer via a remote network connection, each of the network screens operable to prompt the customer to enter photomask specification data;
wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;
receiving the photomask specification data from the customer computer via the remote network connection, at local computing equipment on a local network of the photomask manufacturer; and
using the local computing equipment to perform the following tasks;
to validate the photomask specification data during the remote network connection;
to generate fracturing instructions in response to the photomask specification data;
to receive pattern design data from the customer;
to use the fracturing instructions and the pattern design data to generate fractured pattern data; and
to generate control instructions for the manufacturing equipment. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification