Integral resonator gyroscope
First Claim
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1. An inertial sensor, comprising:
- a planar mechanical resonator for sensing motion of the inertial sensor; and
a case for housing the resonator;
wherein the resonator and a wall of the case are defined through an etching process.
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Abstract
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
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Citations
58 Claims
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1. An inertial sensor, comprising:
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a planar mechanical resonator for sensing motion of the inertial sensor; and
a case for housing the resonator;
wherein the resonator and a wall of the case are defined through an etching process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A method of producing a sensor comprising the steps of:
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etching a baseplate;
bonding a wafer to the etched baseplate;
through etching the wafer to form a planar mechanical resonator;
through etching the wafer to form the wall of the case; and
bonding an end cap wafer to the wall to complete the case. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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Specification