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Gallium nitride semiconductor device and method of producing the same

  • US 20040056267A1
  • Filed: 05/27/2003
  • Published: 03/25/2004
  • Est. Priority Date: 05/29/2002
  • Status: Abandoned Application
First Claim
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1. A gallium nitride semiconductor device comprising an electrode composed of a metallic film on an underlying gallium nitride compound semiconductor layer (hereinafter referred to as underlying compound semiconductor layer), wherein recessed portions are present dispersely over the whole surface area of said underlying compound semiconductor layer in contact with said electrode metallic film in such a manner that at least two recessed portions having a depth greater than the lattice constant of crystals constituting said underlying compound semiconductor layer are present on a width direction line in any 1 μ

  • m width region of said whole surface area.

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