Power monitoring unit, control method therefor, and exposure apparatus
First Claim
1. A power monitoring apparatus which monitors a power supply for failures, comprising:
- monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range;
determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from said monitoring means to determine the power failure rank of the power supply; and
output means for outputting a power failure signal indicating the power failure rank determined by said determination means to a power supply destination of the power supply.
1 Assignment
0 Petitions
Accused Products
Abstract
A power monitoring apparatus monitors the voltage fluctuation range of an AC power supply and the duration of voltage fluctuations within the voltage fluctuation range. The power monitoring apparatus looks up a power failure rank table for determining the power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as the monitoring result to determine the power failure rank of the power supply. The power monitoring apparatus sends a power failure signal indicating the power failure rank to a power supply destination of an AC power supply.
118 Citations
17 Claims
-
1. A power monitoring apparatus which monitors a power supply for failures, comprising:
-
monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range;
determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from said monitoring means to determine the power failure rank of the power supply; and
output means for outputting a power failure signal indicating the power failure rank determined by said determination means to a power supply destination of the power supply. - View Dependent Claims (2, 3)
-
-
4. An exposure apparatus which has a power monitoring apparatus which monitors a power supply for failures and projects a pattern on a first substrate onto a second substrate to expose the second substrate to the pattern using a projection optical system,
wherein the power monitoring apparatus comprises monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from said monitoring means to determine the power failure rank of the power supply, and output means for outputting a power failure signal indicating the power failure rank determined by said determination means to a power supply destination of the power supply, and the exposure apparatus comprises control means for controlling operation of units constituting the exposure apparatus on the basis of the power failure rank indicated by the power failure signal output from the power monitoring apparatus.
-
9. An exposure apparatus which has a plurality of power monitoring apparatuses which monitor a power supply for failures and projects a pattern on a first substrate onto a second substrate to expose the second substrate to the pattern using a projection optical system,
wherein units constituting the exposure apparatus are divided into unit groups, and each of the plurality of power monitoring apparatuses monitors power supply state of each unit group, each power monitoring apparatus comprises monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from said monitoring means to determine the power failure rank of the power supply, and output means for outputting a power failure signal indicating the power failure rank determined by said determination means to a power supply destination of the power supply, and the exposure apparatus comprises control means for controlling operation of the unit groups on the basis of the power failure rank indicated by power failure signals output from the plurality of power monitoring apparatuses.
-
14. A semiconductor device manufacturing method of manufacturing a semiconductor device using an exposure apparatus which projects a pattern on a first substrate onto a second substrate to expose the second substrate to the pattern using a projection optical system, comprising:
-
an application step of applying a photosensitive agent to the second substrate;
an exposing step of exposing the second substrate by the exposure apparatus; and
a development step of developing the exposed second substrate, wherein the exposure apparatus comprises a power monitoring apparatus which monitors a power supply for failures and control means for controlling operation of units constituting the exposure apparatus on the basis of a power failure rank indicated by a power failure signal output from the power monitoring apparatus, and the power monitoring apparatus comprises monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from the monitoring means to determine the power failure rank of the power supply, and output means for outputting a power failure signal indicating the power failure rank determined by the determination means to a power supply destination of the power supply.
-
-
15. A semiconductor device manufacturing method of manufacturing a semiconductor device using an exposure apparatus which projects a pattern on a first substrate onto a second substrate to expose the second substrate to the pattern using a projection optical system, comprising:
-
an application step of applying a photosensitive agent to the second substrate;
an exposing step of exposing the second substrate by the exposure apparatus; and
a development step of developing the exposed second substrate, wherein the exposure apparatus comprises a plurality of power monitoring apparatuses which monitor a power supply for failures and control means for controlling operation of unit groups into which units constituting the exposure apparatus are divided, on the basis of a power failure rank indicated by a power failure signal output from each of the plurality of power monitoring apparatuses, each of the plurality of power monitoring apparatuses monitors power supply state of each unit group, and each power monitoring apparatus comprises monitoring means for monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, determination means for looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result from the monitoring means to determine the power failure rank of the power supply, and output means for outputting a power failure signal indicating the power failure rank determined by the determination means to a power supply destination of the power supply.
-
-
16. A method of controlling a power monitoring apparatus which monitors a power supply for failures, comprising:
-
a monitoring step of monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, a determination step of looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result in the monitoring step to determine the power failure rank of the power supply, and an output step of outputting a power failure signal indicating the power failure rank determined in the determination step to a power supply destination of the power supply.
-
-
17. A program for controlling a power monitoring apparatus which monitors a power supply for failures, comprising:
-
a program code for a monitoring step of monitoring a voltage fluctuation range of the power supply and a duration of voltage fluctuations within the voltage fluctuation range, a program code for a determination step of looking up a power failure rank table for determining a power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as a monitoring result in the monitoring step to determine the power failure rank of the power supply, and a program code for an output step of outputting a power failure signal indicating the power failure rank determined in the determination step to a power supply destination of the power supply.
-
Specification