×

Method of making stress-resistant anti-reflection multilayer coatings containing cerium oxide

  • US 20040057142A1
  • Filed: 07/10/2003
  • Published: 03/25/2004
  • Est. Priority Date: 07/10/2002
  • Status: Abandoned Application
First Claim
Patent Images

1. A method for producing a stress-resistant heat-treated anti-reflection coated inorganic substrate comprising:

  • (a) coating an inorganic substrate with an inner layer comprising an oxide of titanium and an oxide of silicon;

    (b) coating the inner layer with a middle layer comprising a mixture of an oxide of cerium and at least one oxide of a metal selected from the group consisting of silicon, nickel and transition metals of Group IIIB, Group IVB, Group VB and Group VIB of the Periodic Table;

    (c) coating the middle layer with an outer layer comprising an oxide of silicon; and

    (d) heat treating the coated inorganic substrate;

    wherein the heat-treated anti-reflection coated inorganic substrate is resistant to cracking and crazing.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×