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Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

  • US 20040057589A1
  • Filed: 06/17/2003
  • Published: 03/25/2004
  • Est. Priority Date: 06/18/2002
  • Status: Active Grant
First Claim
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1. A micro-mechanical pressure transducer comprising:

  • a capacitive transducer structure comprising;

    a pressure sensitive diaphragm formed from a first substrate, a conductive layer formed on the diaphragm, and an electrode formed on a second substrate, an inductor coil formed within a plurality of layers forming the second substrate, the first substrate being bonded to the second substrate whereby a pre-determined air gap is formed between the diaphragm and the electrode and the capacitive transducer structure is integrated with the inductor coil to form a LC tank circuit, the resonant frequency of which may be detected by imposing an electromagnetic field on the capacitive transducer.

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