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Monitoring system comprising infrared thermopile detetor

  • US 20040058488A1
  • Filed: 09/23/2003
  • Published: 03/25/2004
  • Est. Priority Date: 05/08/2002
  • Status: Active Grant
First Claim
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1. A semiconductor process system adapted for processing of a material therein, said system comprising:

  • a sampling region for the material;

    an infrared radiation source constructed and arranged to transmit infrared radiation through the sampling region;

    a thermopile detector constructed and arranged to receive infrared radiation after the transmission thereof through the sampling region and to responsively generate output signals correlative of said material; and

    process control means arranged to receive the output signals of the thermopile detector and to responsively control one or more process conditions in and/or affecting the semiconductor process system, wherein said infrared radiation is transmitted along a transmission path that is substantially linear, and wherein said infrared radiation source and said thermopile detector are aligned along the transmission path of said infrared radiation.

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