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Position detecting method and apparatus

  • US 20040058540A1
  • Filed: 09/18/2003
  • Published: 03/25/2004
  • Est. Priority Date: 09/20/2002
  • Status: Active Grant
First Claim
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1. A position detection method for detecting the position of an object upon receiving light from a plurality of position detection marks on the object, comprising:

  • an image information acquisition step of obtaining image information of the position detection marks from the light that has been received;

    a conversion step of converting the image information to a light-intensity signal for each line of a plurality of lines partitioned in a direction substantially orthogonal to a direction in which the position detection marks are detected;

    a determination step of determining whether the light-intensity signal of each line is valid or not; and

    a position information calculation step of calculating position information of the position detection marks from light-intensity signals of valid lines.

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