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Pressure sensor and method of making the same

  • US 20040060360A1
  • Filed: 09/18/2003
  • Published: 04/01/2004
  • Est. Priority Date: 04/10/2002
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising:

  • a first membrane that flexes in response to pressure;

    a reference cavity covered by said first membrane, said reference cavity containing a vacuum; and

    a second membrane adjacent to said first membrane and not within said reference cavity, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure.

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