METHOD AND APPARATUS FOR AN IMPROVED OPTICAL WINDOW DEPOSITION SHIELD IN A PLASMA PROCESSING SYSTEM
First Claim
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1. An optical window deposition shield for accessing a process space through a deposition shield in a plasma processing system comprising:
- a plug configured to provide optical access through said deposition shield, said plug comprises a frontal surface and a perimeter surface;
a flange coupled to said plug and configured to couple said optical window deposition shield to at least one of the deposition shield and a chamber wall of the plasma processing system, said flange comprising a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface; and
a protective barrier coupled to a plurality of exposed surfaces of said optical window deposition shield, wherein the plurality of exposed surfaces comprise said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface.
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Abstract
The present invention presents an improved optical window deposition shield an improved optical window deposition shield for optical access to a process space in a plasma processing system through a deposition shield, wherein the design and fabrication of the optical window deposition shield advantageously provides an optically clean access to the processing plasma in the process space while sustaining substantially minimal erosion of the optical window deposition shield.
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Citations
84 Claims
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1. An optical window deposition shield for accessing a process space through a deposition shield in a plasma processing system comprising:
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a plug configured to provide optical access through said deposition shield, said plug comprises a frontal surface and a perimeter surface;
a flange coupled to said plug and configured to couple said optical window deposition shield to at least one of the deposition shield and a chamber wall of the plasma processing system, said flange comprising a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface; and
a protective barrier coupled to a plurality of exposed surfaces of said optical window deposition shield, wherein the plurality of exposed surfaces comprise said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of producing an optical window deposition shield for a deposition shield in a plasma processing system, said method comprising:
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fabricating said optical window deposition shield, wherein said optical window deposition shield comprises a plug configured to provide optical access through said deposition shield, said plug comprises a frontal surface and a perimeter surface, and a flange coupled to said plug and configured to couple said optical window deposition shield to at least one of the deposition shield and a chamber wall of the plasma processing system, said flange comprising a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface; and
forming a protective barrier on exposed surfaces, wherein said exposed surfaces comprise said frontal surface of said insert, said perimeter surface of said insert, and said first surface of said flange excluding said mating surface. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. An insert for a deposition shield in a plasma processing system comprising:
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a plug configured to fit into an opening in said deposition shield, said plug comprises a frontal surface and a perimeter surface;
a flange coupled to said plug and configured to couple said insert to at least one of the deposition shield and a chamber wall of the plasma processing system, said flange comprising a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface; and
a protective barrier coupled to a plurality of exposed surfaces of said insert, wherein the plurality of exposed surfaces comprise said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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57. A method of producing an insert for a deposition shield in a plasma processing system, said method comprising:
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fabricating said insert, wherein said insert comprises a plug configured to fit into an opening in said deposition shield, said plug comprises a frontal surface and a perimeter surface and a flange coupled to said plug and configured to couple said insert to at least one of the deposition shield and a chamber wall of the plasma processing system, said flange comprising a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface; and
forming a protective barrier on exposed surfaces, wherein said exposed surfaces comprise said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface. - View Dependent Claims (58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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78. A method of producing an optical window deposition shield for accessing a process space through a deposition shield in a plasma processing system, said method comprising the steps:
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fabricating said optical window deposition shield, said optical window deposition shield comprising a plug, said plug comprises a frontal surface and a perimeter surface, and a flange coupled to said plug, said flange comprises a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface;
anodizing said optical window deposition shield to form a surface anodization layer on said optical window deposition shield;
machining exposed surfaces on said optical window deposition shield to remove said surface anodization layer, said exposed surfaces comprising said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface; and
forming a protective barrier on the exposed surfaces. - View Dependent Claims (79, 80, 84)
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81. A method of producing an improved optical window deposition shield for accessing a process space through a deposition shield in a plasma processing system, said method comprising the steps:
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fabricating said optical window deposition shield, said optical window deposition shield comprising a plug, said plug comprises a frontal surface and a perimeter surface, and a flange coupled to said plug, said flange comprises a first surface, a second surface, and an edge surface, wherein a portion of said first surface comprises a mating surface;
masking exposed surfaces on said optical window deposition shield to prevent formation of a surface anodization layer, said exposed surfaces comprising said frontal surface of said plug, said perimeter surface of said plug, and said first surface of said flange excluding said mating surface;
anodizing said optical window deposition shield to form a surface anodization layer on said optical window deposition shield;
unmasking the exposed surfaces; and
forming a protective barrier on the exposed surfaces. - View Dependent Claims (82, 83)
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Specification