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Method and apparatus for an improved bellows shield in a plasma processing system

  • US 20040060656A1
  • Filed: 09/30/2002
  • Published: 04/01/2004
  • Est. Priority Date: 09/30/2002
  • Status: Active Grant
First Claim
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1. An improved bellows shield for protecting a bellows on a substrate holder of a plasma processing system comprising:

  • a cylindrical wall comprising an inner surface, an outer surface, a first end, and a second end, wherein said first end comprises an attachment flange, said attachment flange comprising an interior surface coupled to said inner surface of said cylindrical wall and configured to mate with said substrate holder, an inner radial surface coupled to said interior surface, and an exterior surface coupled to said outer surface and said inner radial surface, and wherein said second end of said cylindrical wall comprises an end surface; and

    a protective barrier coupled to a plurality of exposed surfaces of said bellows shield, wherein said plurality of exposed surfaces comprise said end surface of said second end, said outer surface of said cylindrical wall, and said exterior surface of said attachment flange of said first end.

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