High reliability multlayer circuit substrates and methods for their formation
First Claim
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1. A method for forming a multilayer circuit substrate, comprising:
- providing a dielectric base substrate;
forming conductors on the base substrate;
forming sacrificial structures on the base substrate and conductors to define areas to be protected from deposition of a dielectric layer;
vacuum depositing a dielectric thin film on the base substrate, the conductors and the sacrificial structures; and
removing the sacrificial structures to leave a patterned deposited dielectric thin film on the conductors and the base substrate.
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Abstract
A multilayer circuit substrate for multi-chip modules or hybrid circuits includes a dielectric base substrate, conductors formed on the base substrate and a vacuum deposited dielectric thin film formed over the conductors and the base substrate. The vacuum deposited dielectric thin film is patterned using sacrificial structures formed by shadow mask techniques. Substrates formed in this manner enable significant increases in interconnect density and significant reduction of over-all substrate thickness.
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Citations
31 Claims
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1. A method for forming a multilayer circuit substrate, comprising:
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providing a dielectric base substrate;
forming conductors on the base substrate;
forming sacrificial structures on the base substrate and conductors to define areas to be protected from deposition of a dielectric layer;
vacuum depositing a dielectric thin film on the base substrate, the conductors and the sacrificial structures; and
removing the sacrificial structures to leave a patterned deposited dielectric thin film on the conductors and the base substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A multilayer circuit substrate, comprising:
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a dielectric base substrate;
a conductor formed on the base substrate; and
a patterned vacuum deposited dielectric thin film formed on the base substrate and the conductor. - View Dependent Claims (28, 29, 30, 31)
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Specification