Orientation stabilization for MEMS devices
First Claim
1. A method comprising:
- receiving, from a position sensor corresponding to a MEMS device, a sensor signal indicative of a current position of a movable part of the MEMS device with respect to a stationary part of the MEMS device; and
generating a control signal as a function of the sensor signal, wherein an actuator of the MEMS device achieves a desired position of the movable part with respect to the stationary part based on the control signal.
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Accused Products
Abstract
A control circuit designed to control driving voltages applied to the actuating electrodes of a MEMS mirror. The control circuit is interfaced with a mirror position sensor and includes a variable gain amplifier whose output depends on a desired mirror equilibrium angle and a current mirror tilt angle determined by the sensor. The desired equilibrium angle can be changed by varying a reference signal applied to the amplifier. The control circuit can stabilize the mirror at relatively large tilt angles and, as a result, extend the available angular range beyond the snap-down angle. Since the number of MEMS mirrors that can be arrayed in an optical cross-connect is a function of the available angular range, the number of channels in a cross-connect may be substantially increased.
15 Citations
19 Claims
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1. A method comprising:
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receiving, from a position sensor corresponding to a MEMS device, a sensor signal indicative of a current position of a movable part of the MEMS device with respect to a stationary part of the MEMS device; and
generating a control signal as a function of the sensor signal, wherein an actuator of the MEMS device achieves a desired position of the movable part with respect to the stationary part based on the control signal. - View Dependent Claims (2, 3, 4, 5)
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6. Apparatus, comprising:
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a MEMS device; and
a controller adapted to;
receive, from a position sensor corresponding to the MEMS device, a sensor signal indicative of a current position of a movable part of the MEMS device with respect to a stationary part of the MEMS device; and
generate a control signal as a function of the sensor signal, wherein an actuator of the MEMS device is adapted to achieve a desired position of the movable part with respect to the stationary part based on the control signal. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. Apparatus, comprising:
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means for receiving, from a position sensor corresponding to a MEMS device, a sensor signal indicative of a current position of a movable part of the MEMS device with respect to a stationary part of the MEMS device; and
means for generating a control signal as a function of the sensor signal, wherein an actuator of the MEMS device achieves a desired position of the movable part with respect to the stationary part based on the control signal.
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Specification