SHOCK PROTECTORS FOR MICRO-MECHANICAL SYSTEMS

• US 20040061962A1
• Filed: 09/27/2002
• Published: 04/01/2004
• Est. Priority Date: 09/27/2002
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Kwon, Haesung
• Granted Patent: US 6,733,144 B2
• Time in Patent Office: Days
• US Class Current: 359/876
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81B 7/0016 Protection against shocks or vibrations, e.g. vibration damping
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

The present invention is directed towards shock protectors for a pedestal suspended over a lower surface by a plurality of gimbal springs. Each gimbal spring is connected to a linkage arm that attaches to an actuator. A stop located below the bottom of the pedestal prevents the gimbal springs and/or other structures from impacting the lower surface. In addition, the stop prevents excessively high strain in the gimbal springs. A shock absorber extending from at least one linkage arm serves a similar purpose when the pedestal is tilted, rather than simply displaced.

Claims

1. An apparatus, comprising:

(a) a pedestal having a top and a bottom;

(b) a plurality of gimbal springs suspending the pedestal over a lower surface;

(c) a linkage arm connected to each gimbal spring, the connection occurring at a linkage-arm/gimbal-spring attachment point; and

(d) a stop located below the bottom of the pedestal.

2. The apparatus, according to claim 1, further comprising:

(a) a post mounted to the top of the pedestal; and

(b) a mirror mounted on the post.

3. The apparatus, according to claim 1, further comprising an actuator coupled to at least one linkage arm, the actuator being suspended in an actuator plane that is substantially parallel to and above the lower surface.

4. The apparatus, according to claim 3, wherein the stop extends upwards from the lower surface.

5. The apparatus, according to claim 3, wherein the stop extends 10 μ

m upwards from the lower surface.

6. The apparatus, according to claim 1, wherein the stop extends to within 3 μ

m of the bottom of the pedestal.

7. The apparatus, according to claim 1, wherein the stop has a top with a cross-sectional area that is at least 4 times the cross-sectional area of bottom of the pedestal.

8. The apparatus, according to claim 1, wherein the stop has a top with a circular cross-section, the circular cross section having a diameter greater than 120 μ

m.

9. The apparatus, according to claim 1, further comprising a shock absorber that extends beyond the linkage-arm/gimbal-spring attachment point.

10. An apparatus, comprising:

(a) a pedestal having a top and a bottom;

(b) a plurality of gimbal springs suspending the pedestal above a lower surface;

(c) a linkage arm connected to each gimbal spring, the connection occurring at a linkage-arm/gimbal-spring attachment point; and

(d) a shock absorber that extends from at least one linkage arm beyond the linkage-arm/gimbal-spring attachment point.

11. The apparatus, according to claim 10, further comprising:

(a) a post mounted to the top of the pedestal; and

(b) a mirror mounted on the post.

12. The apparatus, according to claim 10 wherein the shock absorber is a flexible extension of the at least one linkage arm.

13. The apparatus, according to claim 12 wherein the shock absorber extends a sufficiently long distance to ensure that it contact the lower surface prior to the gimbal spring.

14. The apparatus, according to claim 13, further comprising a stop located below the bottom of the pedestal.

15. The apparatus, according to claim 10, wherein the shock absorber is disposed closer to the lower surface than the at least one linkage arm.

16. The apparatus, according to claim 10, wherein a shock absorber extends each linkage arm beyond the linkage-arm/gimbal-spring attachment point.

17. A method for increasing heat transfer from a mirror coupled to a pedestal suspended by gimbal springs over a lower surface, the method comprising:

providing a solid heat-conduction path to the lower surface, the solid heat-conduction path being located within 3 μ

m of the pedestal.

18. The method, according to claim 17, wherein the solid heat-conduction path has a cross-sectional area that is at least 4 times greater than the cross-sectional area of the pedestal.

19. The method, according to claim 17, wherein the heat transfer from the mirror is increased by at least 10%.

20. The method, according to claim 17, wherein the solid heat-conduction path includes a high-conductivity material.