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Comprehensive integrated lithographic process control system based on product design and yield feedback system

  • US 20040063009A1
  • Filed: 09/30/2002
  • Published: 04/01/2004
  • Est. Priority Date: 09/30/2002
  • Status: Active Grant
First Claim
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1. A process control system comprising:

  • a controller that controllably performs a fabrication process;

    a process tool that obtains measurement information and is controlled by the controller; and

    a monitor component that collectively analyzes the measurement information, appropriately weights the information and determines whether the fabrication process is acceptable.

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