×

Semiconductor device having MEMS

  • US 20040063325A1
  • Filed: 09/17/2003
  • Published: 04/01/2004
  • Est. Priority Date: 09/19/2002
  • Status: Active Grant
First Claim
Patent Images

1. A semiconductor device having a MEMS, comprising:

  • a semiconductor substrate on which an integrated circuit is formed; and

    a plurality of units which are formed on said semiconductor substrate and comprise movable portions that physically move on the basis of a first electrical signal, each of said units comprising at least a control electrode which supplies a control signal for causing the movable portion to physically move, a driving circuit which outputs the control signal to the control electrode on the basis of the first electrical signal, a sensor electrode which detects physical motion of the movable portion, a sensor circuit which generates a second electrical signal corresponding to physical motion of the movable portion on the basis of a signal from the sensor electrode, a memory which holds an externally input setting value, and a processor which generates the first electrical signal on the basis of the setting value held in the memory, and controls output of the control signal from the driving circuit on the basis of the generated first electrical signal and the second electrical signal, thereby controlling operation of the movable portion, wherein the driving circuit, the sensor circuit, the memory, and the processor are constituted by part of the integrated circuit.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×