Semiconductor etching paste and the use thereof for localized etching of semiconductor substrates
First Claim
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1. A method of etching a semiconductor substrate, the method comprising the steps of:
- applying an etching paste comprising an etchant to a part or a layer of the substrate; and
heating the substrate, such that the part or the layer of the substrate upon which the etching paste has been applied is etched.
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Abstract
A method of etching a semiconductor substrate is described, the method comprising the steps of applying a paste containing an etchant to the substrate, and carrying out a thermal processing step to etch a part or a layer of the substrate where the paste has been applied. The etchant paste is preferably a caustic etching paste. The etchant paste may be applied selectively to a major surface of the substrate to form a pattern of applied paste. For example, the paste may be applied by a printing method, such as screen-printing. The method may be used to produce solar cells.
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Citations
25 Claims
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1. A method of etching a semiconductor substrate, the method comprising the steps of:
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applying an etching paste comprising an etchant to a part or a layer of the substrate; and
heating the substrate, such that the part or the layer of the substrate upon which the etching paste has been applied is etched. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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- 17. A semiconductor substrate upon which an etching paste is deposited, the etching paste comprising a solvent and a caustic etching agent.
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24. An etching paste suitable for use in etching a semiconductor substrate, the etching paste comprising:
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a solvent;
a caustic etching agent selected from the group consisting of potassium hydroxide, sodium hydroxide, ammonium hydroxide, combinations thereof, and derivatives thereof, and a thickener selected from the group consisting of a metal carboxyalkylcellulose salt, a hydrocolloid-forming cellulose, a starch, a physically modified hydrocolloid-forming cellulose, a chemically modified hydrocolloid forming cellulose, a physically modified starch, a chemically modified starch, a strongly hydrolyzed polyacrylamide gel, combinations thereof, and derivatives thereof. - View Dependent Claims (25)
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Specification