Method and a mold to arrange features on a substrate to replicate features having minimal dimensional variability
First Claim
1. A method of arranging features on a substrate to replicate features having minimal dimensional variability, said method comprising:
- forming a flowable material on said substrate;
forming a plurality of features in a region of said flowable material, with said plurality of features in said region being arranged to provide a substantially uniform fill factor in said region.
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Abstract
The present invention is directed to a method of and a mold for arranging features on a substrate to replicate the features with minimal dimensional variability. The method includes arranging features on a layer to minimize thickness variations in the layer that are attributable to density variations of the plurality of features on the layer. The features are transferred into an underlying substrate. It is believed that by forming the features so as to define a uniform fill factor in the layer, the thickness variations may be reduced, if not abrogated. To that end, one method in accordance with the present invention includes forming a flowable material on the substrate. Thereafter, a plurality of features is formed in a region of the flowable material. The plurality of features are arranged to provide a substantially uniform fill factor in the region.
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Citations
20 Claims
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1. A method of arranging features on a substrate to replicate features having minimal dimensional variability, said method comprising:
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forming a flowable material on said substrate;
forming a plurality of features in a region of said flowable material, with said plurality of features in said region being arranged to provide a substantially uniform fill factor in said region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of arranging features on a substrate to replicate features having minimal dimensional variability, said method comprising:
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forming a flowable material on said substrate;
forming a plurality of features in a region of said flowable material, with said plurality of features in said region being arranged to minimize thickness variations in said flowable material attributable to density variations of said plurality of features in said region. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A mold to arrange features on a substrate to replicate features having minimal dimensional variability, said mold comprising:
a body having opposed sides, with one of said sides including a plurality of features arranged thereon to define a uniform film factor. - View Dependent Claims (17, 18, 19, 20)
Specification