Method and a mold to arrange features on a substrate to replicate features having minimal dimensional variability

• US 20040065976A1
• Filed: 10/04/2002
• Published: 04/08/2004
• Est. Priority Date: 10/04/2002
• Status: Active Grant

• Current Assignee: Mii Newco, Inc.
• Original Assignee: Molecular Imprints, Inc. (Canon Inc.)
• Inventors: Sreenivasan, Sidlgata, Watts, Michael
• Granted Patent: US 8,349,241 B2
• Time in Patent Office: Days
• US Class Current: 264/171.1
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2035/0833 using actinic light
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 2059/023 Microembossing
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B29C 59/022 characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

The present invention is directed to a method of and a mold for arranging features on a substrate to replicate the features with minimal dimensional variability. The method includes arranging features on a layer to minimize thickness variations in the layer that are attributable to density variations of the plurality of features on the layer. The features are transferred into an underlying substrate. It is believed that by forming the features so as to define a uniform fill factor in the layer, the thickness variations may be reduced, if not abrogated. To that end, one method in accordance with the present invention includes forming a flowable material on the substrate. Thereafter, a plurality of features is formed in a region of the flowable material. The plurality of features are arranged to provide a substantially uniform fill factor in the region.

Claims

1. A method of arranging features on a substrate to replicate features having minimal dimensional variability, said method comprising:

forming a flowable material on said substrate;

forming a plurality of features in a region of said flowable material, with said plurality of features in said region being arranged to provide a substantially uniform fill factor in said region.

2. The method as recited in claim 1 wherein said plurality of features are disposed to be periodic over said region.

3. The method as recited in claim 1 wherein forming said plurality of features further includes forming said plurality of features in said region to have geometric patterns selected from a set of patterns consisting essentially of arcuate shapes, L-shapes and linear shapes.

4. The method as recited in claim 1 wherein forming said plurality of features further includes forming said plurality of features in said region to have first and second sets of linear shapes, with said first set of linear shapes intersecting said second set of linear shapes and extending orthogonally thereto to define a matrix pattern.

5. The method as recited in claim 1 wherein forming said plurality of features further includes forming said plurality of features in said region as a plurality of spaced-apart projections having a cross-sectional shape from a set of shapes consisting essentially of polygonal and circular.

6. The method as recited in claim 1 wherein said region consists of an entire area of said flowable material.

7. The method as recited in claim 1 wherein said region consists of a subportion of an area defined by said flowable material.

8. The method as recited in claim 1 wherein all of said plurality of features have a common shape.

9. The method as recited in claim 1 wherein forming said flowable material further includes depositing a bead of said polymerizable material onto said substrate and forming said plurality of features further includes contacting said bead with a mold having a relief structure on a surface thereof to spread said bead over said region, imprinting said plurality of features therein and further including subjecting said polymerizable material to conditions to polymerize said polymerizable material, forming a polymerized layer.

10. A method of arranging features on a substrate to replicate features having minimal dimensional variability, said method comprising:

forming a flowable material on said substrate;

forming a plurality of features in a region of said flowable material, with said plurality of features in said region being arranged to minimize thickness variations in said flowable material attributable to density variations of said plurality of features in said region.

11. The method as recited in claim 10 wherein forming further includes arranging said plurality of features to be periodic over said region, with each of said plurality of features having a geometric pattern selected from a set of patterns consisting essentially of arucate shapes, L-shapes and linear shapes.

12. The method as recited in claim 11 wherein forming said flowable material further includes depositing a bead of said polymerizable material onto said substrate and forming said plurality of features further includes contacting said bead with a mold having a relief structure on a surface thereof to spread said bead over said region, imprinting said plurality of features therein and further including subjecting said polymerizable material to conditions to polymerize said polymerizable material, forming a polymerized layer.

13. The method as recited in claim 12 wherein forming said plurality of features further includes forming said plurality of features in said region to have first and second sets of said linear shapes, with said first set intersecting said second set shapes and extending orthogonally thereto to define a matrix pattern.

14. The method as recited in claim 12 wherein forming said plurality of features further includes forming said plurality of features in said region as a plurality of spaced-apart projections having a cross-sectional shape from a set of shapes consisting essentially of polygonal and circular.

15. The method as recited in claim 14 wherein all of said plurality of features have a common shape.

16. A mold to arrange features on a substrate to replicate features having minimal dimensional variability, said mold comprising:

a body having opposed sides, with one of said sides including a plurality of features arranged thereon to define a uniform film factor.

17. The mold as recited in claim 16 wherein said plurality of features to be periodic over said one of said opposed sides, with each of said plurality of features having a geometric pattern selected from a set of patterns consisting essentially of arucate shapes, L-shapes and linear shapes.

18. The mold as recited in claim 16 wherein said plurality of features have first and second sets of said linear shapes, with said first set intersecting said second set and extending orthogonally thereto to define a matrix pattern on said one of said opposed sides.

19. The mold as recited in claim 16 wherein said plurality of features further includes a plurality of spaced-apart projections having a cross-sectional shape from a set of shapes consisting essentially of polygonal and circular.

20. The mold as recited in claim 16 wherein said body is formed from material that is transparent to predetermined ranges of radiation and all of said plurality of features have a common shape.