Electrode configuration for retaining cooling gas on electrostatic wafer clamp

• US 20040066601A1
• Filed: 10/04/2002
• Published: 04/08/2004
• Est. Priority Date: 10/04/2002
• Status: Abandoned Application

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Larsen, Grant Kenji
• Application Number:
  US10/264,985
• Publication Number:
  US 20040066601A1
• Time in Patent Office: Days
• US Class Current: 361/234
• CPC Class Codes: H01J 2237/2002 Controlling environment of sample
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Abstract

Apparatus for electrostatic clamping of a semiconductor wafer includes a dielectric element that defines a clamping surface for receiving the semiconductor wafer and two or more electrodes, including a first electrode disposed at or near a periphery of the clamping surface and a second electrode disposed inwardly of the first electrode. The first and second electrodes have variable widths that form interdigitated projections along adjacent sides of the first and second electrodes. The interdigitated projections limit flexing of the wafer at or near its outer periphery and thereby enhance retention of cooling gas between the semiconductor wafer and the clamping surface.

Claims

1. Apparatus for electrostatic clamping of a semiconductor wafer, comprising:

a dielectric element that defines a clamping surface for receiving a semiconductor wafer; and

two or more electrodes electrically isolated from said clamping surface, said electrodes including a first electrode disposed at or near a periphery of said clamping surface and a second electrode disposed inwardly of said first electrode, wherein said first and second electrodes have variable widths that form interdigitated projections along adjacent sides of said first and second electrodes.

2. Apparatus as defined in claim 1, wherein the interdigitated projections are smoothly curved.

3. Apparatus as defined in claim 1, wherein the interdigitated projections are substantially uniformly spaced.

4. Apparatus as defined in claim 1, wherein the interdigitated projections are spaced to limit wafer flexing when a voltage is applied to one of the electrodes.

5. Apparatus as defined in claim 1, wherein said first and second electrodes are strip-like and are relatively long and thin.

6. Apparatus as defined in claim 1, wherein said clamping surface is substantially circular.

7. Apparatus as defined in claim 6, wherein the interdigitated projections are formed on generally arc-shaped portions of said first and second electrodes.

8. Apparatus as defined in claim 1, further comprising a voltage source for applying phase-shifted clamping voltages to said two or more electrodes, wherein the semiconductor wafer is electrostatically clamped to said clamping surface.

9. Apparatus as defined in claim 8, wherein said clamping voltages comprise bipolar square wave voltages or trapezoidal voltages.

10. Apparatus as defined in claim 1, further comprising one or more gas inlets on said clamping surface.

11. Apparatus as defined in claim 10, further comprising a cooling gas source coupled to said gas inlets for supplying a cooling gas between the semiconductor wafer and said clamping surface.

12. Apparatus as defined in claim 1, wherein the interdigitated projections have a wave-like configuration.

13. Apparatus as defined in claim 12, wherein the wave-like configuration of projections has a relatively small amplitude to wavelength ratio.

14. Apparatus for electrostatic clamping of a workpiece, comprising:

at least two electrodes comprising strip-like conductors disposed side-by-side and electrically isolated from each other, said strip-like conductors having variable widths that form interdigitated projections along adjacent sides thereof;

a dielectric element disposed on said at least two electrodes, said dielectric element defining a clamping surface for receiving a workpiece; and

a clamping voltage source for applying phase-shifted clamping voltages to said at least two electrodes, wherein the workpiece is electrostatically clamped to said clamping surface.

15. Apparatus as defined in claim 14, wherein said clamping voltages comprise square wave voltages.

16. Apparatus as defined in claim 14, wherein said clamping surface is provided with one or more gas inlets.

17. Apparatus as defined in claim 16, further comprising a cooling gas source coupled to said gas inlets for providing a cooling gas between the workpiece and said clamping surface.

18. Apparatus as defined in claim 14, wherein the interdigitated projections have a wave-like configuration.

19. Apparatus as defined in claim 18, wherein the wave-like configuration of projections has a relatively small amplitude to wavelength ratio.

20. A method for electrostatic clamping of a workpiece, comprising:

providing two or more electrodes electrically isolated from a clamping surface for receiving a workpiece, said electrodes including a first electrode disposed at or near a periphery of the clamping surface and a second electrode disposed inwardly of the first electrode, wherein the first and second electrodes have variable widths that form interdigitated projections along adjacent side edges of the first and second electrodes; and

applying phase-shifted clamping voltages to the first and second electrodes, wherein the workpiece is electrostatically clamped to the clamping surface.

21. A method as defined in claim 20, wherein applying phase-shifted clamping voltages comprises applying bipolar square wave voltages or trapezoidal voltages.

22. A method as defined in claim 20, further comprising supplying a cooling gas between the workpiece and the clamping surface.

23. A method as defined in claim 20, wherein providing two or more electrodes comprises providing interdigitated projections having a wave-like configuration.