Fluorescence measurement apparatus and method
First Claim
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1. A machine vibration measuring apparatus comprising an accelerometer and a signal processing means arranged to receive a signal from the accelerometer and to produce an output signal characterised in that the accelerometer is contained within a surface micro machined integrated chip, and wherein the signal processing means includes a low pass filter, the low pass filter acting to remove accelerometer resonance from the signal.
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Abstract
A vibration measuring apparatus (10) inlcudes an accelerometer (12) which is contained within a surface micromachined integrated chip, and signal processing means including a high pass filter (14), a low pass filter (16) and an integrator (18).
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Citations
17 Claims
- 1. A machine vibration measuring apparatus comprising an accelerometer and a signal processing means arranged to receive a signal from the accelerometer and to produce an output signal characterised in that the accelerometer is contained within a surface micro machined integrated chip, and wherein the signal processing means includes a low pass filter, the low pass filter acting to remove accelerometer resonance from the signal.
Specification