Article coated with photocatalyst film, method for preparing the article and sputtering target for use in coating the film
First Claim
1. An article having a substrate and a photocatalyst coating film formed thereon by a sputtering method, characterized in that the photocatalyst coating film comprises:
- 1) titanium oxide as a main component and
2) at least one kind of metal having a sputtering rate for Ar, which has at least one kind of energy in a 100 eV to 2000 eV ion energy area, being 0.9 to 2.7 times that of Ti.
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Abstract
This invention relates to an article having a substrate with a photocatalyst coating film formed thereon by ae sputtering method, characterized in that the photocatalyst coating film comprises titanium oxide as a main component and at least one kind of metal having a sputtering rate for Ar being 0.9 to 2.7 times that of Ti, preferably at least one kind of metal selected from the group consisting of Fe, V, Mo, Nb, Al and Cr, in an amount of 0.01 to 10 wt % in terms of the sum of such metals. The coating film is formed by a method using a Ti metal sputtering target or a Ti sub-oxide sputtering target containing the metal in an amount of 0.01 to 10 wt % in terms of the sum of such metals, or a method using two kinds of targets for two sputtering cathodes and applying reversing potential so as to have a cathode and an anode alternately.
7 Citations
12 Claims
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1. An article having a substrate and a photocatalyst coating film formed thereon by a sputtering method, characterized in that the photocatalyst coating film comprises:
1) titanium oxide as a main component and
2) at least one kind of metal having a sputtering rate for Ar, which has at least one kind of energy in a 100 eV to 2000 eV ion energy area, being 0.9 to 2.7 times that of Ti.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12)
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11. A method for preparing a photocatalyst film coated article, characterized in that two cathodes respectively having a sputtering target of a metal or a metal oxide comprising the photocatalyst film attached adjoining each other, voltage is applied to reverse the polarity of two cathodes alternately so that when one cathode is the negative pole, the other cathode is the positive pole while when said the other cathode is the negative pole, said one cathode is the positive pole, and the two targets are sputtered simultaneously by a glow discharging plasma caused therefrom in a method for coating a substrate by a photocatalyst film comprising titanium oxide as a main component and at least one kind of metal having a sputtering rate for Ar, which has at least one kind of energy in a 100 eV to 2000 eV ion energy area, being 0.9 to 2.7 times that of Ti.
Specification