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Oxide treatment and pressure control for electrodeposition

  • US 20040069651A1
  • Filed: 10/15/2002
  • Published: 04/15/2004
  • Est. Priority Date: 10/15/2002
  • Status: Abandoned Application
First Claim
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1. A method of performing electrodeposition, comprising:

  • providing a substrate having an oxide layer on a conductive surface thereof;

    performing an oxide reduction process on the oxide layer to define an electrical contact area;

    contacting the electrical contact area with an electrically conductive contact element, wherein the electrically conductive contact element is connected to a power source;

    applying a relative pressure between the electrically conductive contact element and the substrate less than a critical pressure capable of detrimentally deforming at least one material of the substrate; and

    electrodepositing a material on the substrate.

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