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Fabrication of a reflective spatial light modulator

  • US 20040069742A1
  • Filed: 02/27/2003
  • Published: 04/15/2004
  • Est. Priority Date: 06/19/2002
  • Status: Abandoned Application
First Claim
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1. A method of fabricating a spatial light modulator, comprising:

  • forming cavities in a first side of a first substrate;

    fabricating electrodes on a first side of a second substrate;

    bonding the first side of the first substrate to the first side of the second substrate; and

    forming hinges, connectors, and mirror plates on a second side of the first substrate after bonding the first side of the first substrate to the first side of the second substrate.

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