Micromirror systems with side-supported mirrors and concealed flexure members

• US 20040070040A1
• Filed: 10/11/2002
• Published: 04/15/2004
• Est. Priority Date: 10/11/2002
• Status: Active Grant

• Current Assignee: Christopher M Aubuchon
• Original Assignee: Christopher M Aubuchon
• Inventors: Aubuchon, Christopher M.
• Granted Patent: US 6,870,659 B2
• Time in Patent Office: Days
• US Class Current: 257/433
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H04N 5/7458 the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
• CPC Class Codes: H04N 9/3102 using two-dimensional electronic spatial light modulators micromechanical modulators as such G02B26/0833; liquid crystal modulators as such G02F1/13

Abstract

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

Claims

1. A micromirror device comprising:

a substrate with electrical components including address circuitry, and

an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror supported by and spaced apart from said substrate by only a pair of mirror supports positioned between opposite portions of said mirror and opposite portions of a hinge comprising at least one torsion member, said hinge located beneath said mirror and supported above said substrate by at least one hinge support between ends of said hinge.

2. The device of claim 1, wherein said electrical components are configured to operate said mirrors in a bistable manner.

3. The device of claim 1, wherein only one hinge support is provided for each said mirror of said array.

4. The device of claim 1, wherein said mirror is square and said opposite portions are opposite corners of said mirror.

5. The device of claim 1, wherein said mirror is hexagonal and said opposite portions are opposite sides of said mirror.

6. The device of claim 1, wherein said mirror is hexagonal and said opposite portions are opposite corners of said mirror.

7. The device of claim 1, wherein said mirror has a diameter less than about 19 microns

8. The device of claim 7, wherein said mirror has a diameter of about 6 microns.

9. The device of claim 1, wherein a face of said mirror is unbroken by non-reflective features.

10. The device of claim 1, wherein between about 88% and about 100% a potential face of said mirror comprises reflective surface.

11. The device of claim 1, wherein border regions in said array comprises less than about 12% of an active reflective area.

12. The device of claim 1, wherein said mirror supports are provided between adjacent micromechanical light modulating elements.

13. The device of claim 1, wherein said mirror supports are in the form of columns.

14. A digital projector comprising a micromirror device chosen from those described in claims 1-13.

15. A method of producing a micromirror device comprising a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements comprising, a mirror supported by and spaced apart from said substrate, a plurality of hinge portions and a plurality of electrodes, said method comprising:

forming mirror support precursors between adjacent mirror precursors regions, said mirror support precursors being attached to said hinge portions, and

etching said mirror support precursors apart and said mirrors precursor regions apart, forming a plurality mirrors and mirror supports.

16. The method of claim 15, wherein each said support precursor provides a pair of mirror supports and said mirrors are square.

17. The method of claim 15, wherein each said support precursor provides a pair of mirror supports and said mirrors are hexagonal.

18. The method of claim 15, wherein each said support precursor provides a single mirror support and said mirrors are hexagonal.