Micromirror systems with side-supported mirrors and concealed flexure members
First Claim
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1. A micromirror device comprising:
- a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror supported by and spaced apart from said substrate by only a pair of mirror supports positioned between opposite portions of said mirror and opposite portions of a hinge comprising at least one torsion member, said hinge located beneath said mirror and supported above said substrate by at least one hinge support between ends of said hinge.
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Abstract
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
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Citations
18 Claims
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1. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror supported by and spaced apart from said substrate by only a pair of mirror supports positioned between opposite portions of said mirror and opposite portions of a hinge comprising at least one torsion member, said hinge located beneath said mirror and supported above said substrate by at least one hinge support between ends of said hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of producing a micromirror device comprising a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements comprising, a mirror supported by and spaced apart from said substrate, a plurality of hinge portions and a plurality of electrodes, said method comprising:
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forming mirror support precursors between adjacent mirror precursors regions, said mirror support precursors being attached to said hinge portions, and etching said mirror support precursors apart and said mirrors precursor regions apart, forming a plurality mirrors and mirror supports. - View Dependent Claims (16, 17, 18)
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Specification