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Micromirror systems with side-supported mirrors and concealed flexure members

  • US 20040070040A1
  • Filed: 10/11/2002
  • Published: 04/15/2004
  • Est. Priority Date: 10/11/2002
  • Status: Active Grant
First Claim
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1. A micromirror device comprising:

  • a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror supported by and spaced apart from said substrate by only a pair of mirror supports positioned between opposite portions of said mirror and opposite portions of a hinge comprising at least one torsion member, said hinge located beneath said mirror and supported above said substrate by at least one hinge support between ends of said hinge.

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